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Axial vernier device for lens with flexible ring piece structure

A technology of fine-tuning device and flexible ring, which is applied in the direction of photolithography exposure device, installation, micro-lithography exposure equipment, etc., can solve the problems of low adjustment accuracy, small carrying capacity, small adjustment stroke, etc., and achieve real-time adjustment ability, large Bearing capacity, effect of compensating tilt error

Inactive Publication Date: 2015-04-22
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to propose a lens axial fine-tuning device with a flexible ring structure to solve the problems of small adjustment stroke, low adjustment accuracy and small bearing capacity in the prior art

Method used

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  • Axial vernier device for lens with flexible ring piece structure
  • Axial vernier device for lens with flexible ring piece structure
  • Axial vernier device for lens with flexible ring piece structure

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings.

[0025] See attached figure 1 And attached figure 2 A lens axial fine-tuning device with a flexible ring structure of the present invention includes an axial fine-tuning assembly 1, a lens assembly 2, three micro-displacement drivers 3 and three micro-displacement sensor assemblies 4; the lens assembly 2 includes a mirror frame 2 -1 and lens 2-2, the micro-displacement sensor assembly 4 includes a micro-displacement sensor 4-1 and a sensor connecting plate 4-2, and the axial fine-tuning assembly 1 includes a lens barrel 1-1, an upper flexible ring sheet 1-2, The lower flexible ring sheet 1-3 and the driving ring 1-4; this device is for adjusting the axial relative position of the lens 2-2. The lens barrel 1-1 is the basis for the installation of the whole fine-tuning device, the lens barrel 1-1 and the upper flexible ring piece 1-2, the lower flexible ring piece 1-3,...

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Abstract

The invention discloses an axial vernier device for a lens with a flexible ring piece structure, belonging to the field of adjustable compensation and functional compensation of a photoetching projection objective. The axial vernier device aims to solve the problems that the adjusting routine is short, the adjusting precision is low and the bearing capacity is small in the prior art. The axial vernier device comprises an axial fine tuning component, a lens component, three micrometric displacement drivers and three micrometric displacement sensor components; the lens component comprises a lens frame and the lens; the micrometric displacement sensor components comprise micrometric displacement sensors and sensor connection plates; the axial fine tuning component comprises a lens cone, an upper flexible ring piece, a lower flexible ring piece and a driving ring; the driving ring is driven to realize up-and-down movement through the micrometric displacement drivers, the flexible deformation of the upper flexible ring piece and the lower flexible ring piece can be realized, and the minor axial adjustment of the lens can be realized. According to the axial vernier device for the lens with the flexible ring structure, the lens is supported and conducted for displacement adjustment through the flexible ring piece structure, the adjusting routine is long and the bearing capacity is large, and the axial adjustment precision of the lens can be guaranteed by being simultaneously controlled by the three micrometric displacement sensors.

Description

technical field [0001] The invention belongs to the field of adjustment compensation and functional compensation of a lithography projection objective lens, and relates to a lens axial fine adjustment device that can be used in a lithography projection objective lens system, in particular to a lens axial fine adjustment device with a flexible ring structure. Background technique [0002] In the lithography projection objective lens, the axial adjustment device used for compensation of most indicators such as magnification, field curvature, astigmatism, distortion, spherical aberration, etc. important device for resolution. The higher the performance requirements of the objective optical system, the higher the mechanical performance requirements of the axial adjustment device, and the adjustment accuracy of the device often needs to be within 0.1 μm. At the same time, when the axial adjustment device is working, the lens surface shape error caused by the adjustment force sho...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/02G03F7/20
Inventor 郭抗巩岩倪明阳孙振
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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