Axial vernier device for lens with flexible ring piece structure

Abstract

The invention discloses an axial vernier device for a lens with a flexible ring piece structure, belonging to the field of adjustable compensation and functional compensation of a photoetching projection objective. The axial vernier device aims to solve the problems that the adjusting routine is short, the adjusting precision is low and the bearing capacity is small in the prior art. The axial vernier device comprises an axial fine tuning component, a lens component, three micrometric displacement drivers and three micrometric displacement sensor components; the lens component comprises a lens frame and the lens; the micrometric displacement sensor components comprise micrometric displacement sensors and sensor connection plates; the axial fine tuning component comprises a lens cone, an upper flexible ring piece, a lower flexible ring piece and a driving ring; the driving ring is driven to realize up-and-down movement through the micrometric displacement drivers, the flexible deformation of the upper flexible ring piece and the lower flexible ring piece can be realized, and the minor axial adjustment of the lens can be realized. According to the axial vernier device for the lens with the flexible ring structure, the lens is supported and conducted for displacement adjustment through the flexible ring piece structure, the adjusting routine is long and the bearing capacity is large, and the axial adjustment precision of the lens can be guaranteed by being simultaneously controlled by the three micrometric displacement sensors.

Description

Technical field [0001] The invention belongs to the field of lithography projection objective lens assembly adjustment compensation and functional compensation, relates to a lens axial fine adjustment device that can be used in a lithography projection objective lens system, and in particular to a lens axial fine adjustment device with a flexible ring structure. Background technique [0002] In the lithographic projection objective, the axial adjustment device used to compensate most of the indicators such as magnification, field curvature, astigmatism, distortion, spherical aberration, etc., is the main means of optical performance compensation of the optical system, and is to ensure that the lithographic projection objective has high An important device for resolution. The higher the performance requirements of the objective optical system, the higher the mechanical performance requirements of the axial adjustment device, and the adjustment accuracy of the device often needs to...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to propose a lens axial fine-tuning device with a flexible ring structure to solve the problems of small adjustment stroke, low adjustment accuracy and small bearing capacity in the prior art

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