Method for manufacturing anodic film of parts of integrated circuit manufacturing equipment

Abstract

The invention discloses a manufacturing method for an anode film of a part of integrated circuit manufacturing equipment. The manufacturing method comprises the following steps of selecting a rectangular aluminum alloy plate as a substrate of an anode film; placing the substrate into an organic solution for surface washing; placing the substrate into a sodium hydroxide solution for alkaline washing; grinding the surface of the substrate; jetting the surface of the substrate to enable the surface roughness of the substrate to be smaller than 1mum; placing the substrate into an anode tank with a sulfuric acid solution with the concentration of 10%, introducing different currents to the sulfuric acid solution under the same voltage according to different stages, and carrying out anodic oxidation treatment on the substrate to form a film; and placing the anode film into 100-DEG C boiled water to carry out hole sealing treatment for 30-60min to obtain the anode film with the thickness of 50-60mum. The thinner anode film obtained by using the manufacturing method for the anode film, disclosed by the invention, achieves the high corrosion, voltage and wear resistance of a thick anode film, so that the aim of protecting the part is achieved.

Description

Technical field

[0001] The invention relates to a method for manufacturing an anode film of a component of an integrated circuit manufacturing equipment. The anode film is specially coated on the outer surface of the component of the integrated circuit manufacturing equipment. Background technique

[0002] The manufacturing process of integrated circuits is the result of a collection of many high-precision technologies, which is extremely important for the control of manufacturing conditions and the mastery of the status of production equipment.

[0003] In the manufacturing process of integrated circuits, high-energy, corrosive, and special gases are used interchangeably, which will consume or damage the parts of production equipment, especially in etching manufacturing. When the consumption or damage of the parts of the production equipment reaches a certain level, it will have an impact on the stability control of the production equipment, and the damage will become more and mor...

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