Angular displacement laser interferometer calibrating method and device based on dual-standard optical axis gas bath
A laser interferometer, laser interference technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of large Abbe, error, air refractive index inconsistency, etc., and achieve the effect of small Abbe error
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[0019] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0020] An angular displacement laser interferometer calibration device based on a double-standard optical axis gas bath, including a standard laser interferometer laser 1, a receiver 6 at a position that can receive the interference signal of the standard laser interferometer, and a wire that interferes the receiver 6 with the standard laser The instrument signal processing system 7 is connected; the standard laser interferometer laser 1 output optical path is equipped with a middle through hole 12, which allows the calibrated laser interferometer measurement beams 10, 11 to pass through the two-axis hollow standard laser interferometer mirror group 2; A guide rail 17 is arranged on one side of the axis hollow standard laser interferometer group 2, and a moving table 16 is mounted on the guide rail 17. A plane mirror 5 with a middle...
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