Calibration method and device of angular displacement laser interferometer based on four-standard-optical-axis gas bath

Abstract

The invention relates to a calibration method and a calibration device of an angular displacement laser interferometer based on a four-standard-optical-axis gas bath, which belong to the technical field of laser measurement. According to the calibration method and the calibration device, four measuring beams of a laser interferometer to be calibrated penetrate through a middle through hole of a four-axis hollow laser interferoscope group, and the four measuring beams of the laser interferometer to be calibrated are arranged in the middle of four parallel standard measuring beams in parallel; the vertical distance between the standard measuring beams and the measuring beams of the laser interferometer to be calibrated is very short, and an air refractive index value of the standard measuring beams is very close to that of the measuring beams of the laser interferometer to be calibrated; air temperature, humidity and air pressure are approximately uniformly distributed in a stable gas bath environment formed by a gas bath device, so that the air refractive index value of the standard measuring beams is closer to that of the measuring beams of the laser interferometer to be calibrated.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique [0002] Angular displacement laser interferometer is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronic equipment, nanotechnology industrial equipment and national defense equipment. It can be used for micro-displacement components, mobile platforms and lithography Monitoring of machine angle changes. The angular displacement laser interferometer can provide high measurement accuracy, and can dynamically measure the relative swing angle in motion, which is a unique advantage different from other instruments. In order to ensure the accuracy of the angular displacement laser interferometer measurement, the Calibration of the displacement laser interferometer is very important. The realization of the angular di...

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Problems solved by technology

[0003] In view of the relatively large Abbe error, serious inconsistency of air refractive index and inaccurate calibration of two sets of laser interferometers in the existing angular displacement laser interferometer calibration device, the present invention proposes and develops a four-standard Calibration method and device for an angular displacement laser interferometer in an optical axis air bath, the invention makes the vertical distance between the standard measuring beam and the calibrated laser interferometer measuring beam very small, thereby reducing the Abbe error and the inconsistency of the air refractive index influence, and it is accurate sense that two sets of laser interferometers are calibrated

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