Angular displacement laser interferometer calibrating method and device based on dual-standard optical axis gas bath

Abstract

The invention discloses an angular displacement laser interferometer calibrating method and device based on a dual-standard optical axis gas bath, and belongs to the technical field of laser measurement. Two measuring light beams of a calibrated laser interferometer pass through the middle through hole of a dual-axle hollow laser interference mirror group; the two measuring light beams of the calibrated laser interferometer are arranged in parallel between two parallel standard measuring light beams; the vertical distances between the standard measuring light beams and the measuring light beams of the calibrated laser interferometer are very small; the air refractive index values of the standard measuring light beams are very close to those of the measuring light beams of the calibrated laser interferometer; a stable gas bath environment is formed by a gas bath device, so that the air temperature, moisture and air pressure are uniformly distributed approximately, and the air refractive index values of the standard measuring light beams are even closer to those of the measuring light beams of the calibrated laser interferometer.

Description

technical field [0001] The invention belongs to the technical field of laser measurement, and mainly relates to a laser interferometer calibration method and device. Background technique [0002] Angular displacement laser interferometer is a standard measurement technology with high precision. It is widely used in precision and ultra-precision machining, microelectronic equipment, nanotechnology industrial equipment and national defense equipment. It can be used for micro-displacement components, mobile platforms and lithography Monitoring of machine angle changes. The angular displacement laser interferometer can provide high measurement accuracy, and can dynamically measure the relative swing angle in motion, which is a unique advantage different from other instruments. In order to ensure the accuracy of the angular displacement laser interferometer measurement, the Calibration of the displacement laser interferometer is very important. The realization of the angular di...

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Problems solved by technology

The calibration method and device of the angular displacement laser interferometer are not proposed in the current literature, but because the angular displacement laser interferometer is a derivative of the linear displacement laser interferometer measurement, the angular displacement laser interferometer calibration can use the linear displacement laser interferometer Calibration method: Parallel method (Leng Yuguo, Tao Lei, Xu Jian. Analysis of the accuracy and influencing factors of dual-frequency laser interferometer system based on 80m measuring device. Metrology and Testing Technology, 2011, 38(9): 47-49) , back-to-back type (Liao Cheng, Zhu Xiaoping, Wang Weichen, Du Hua. Research on calibration method of laser interferometer length measurement accuracy. Modern Measurement and Laboratory Management, 2005, 1:6-7) and common optical path type (Dr-Ing H. -H.Schussler.Comparison and calibration of laser interferometer systems.Measurement, 1985, 3(4):175-184), so the angular displacement laser interferometer calibration device will also have the disadvantages of the linear displacement laser interferometer calibration device: larger Abbe error, severe inconsistency of air refractive index and not accurate sense of two sets of laser interferometers for calibration

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