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A Novel Gyroscope Based on Nano Grating Detection

A nano-grating and gyroscope technology, applied in the field of micro-inertial navigation, can solve the problems of not having the basic conditions of the gyroscope, and not creating a non-sensitive direction of the nano-grating, so as to make full use of space, strong anti-electromagnetic interference ability, and simple design Effect

Active Publication Date: 2017-01-04
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the MEMS gyroscope is mainly based on the detection of the weak Coriolis force, when it needs to resonate in the non-sensitive direction to realize the angular velocity input, the displacement will be generated in the sensitive direction due to the Coriolis force. The principle of sensitivity to the spacing between sub-gratings and the width of the grating slit does not create the insensitive direction of the nano-grating, and does not have the basic conditions for gyroscopes
At present, there is no report on the application of nano-grating detection to micro-mechanical gyroscopes

Method used

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  • A Novel Gyroscope Based on Nano Grating Detection
  • A Novel Gyroscope Based on Nano Grating Detection
  • A Novel Gyroscope Based on Nano Grating Detection

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Embodiment Construction

[0034] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0035] In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right" etc. are based on the attached The orientation or positional relationship shown in the figure is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific ...

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Abstract

The invention discloses a novel gyroscope based on nanometer optical grating detection. The novel gyroscope comprises a bonding base plate, a gasket frame, a support frame, a driving cantilever beam, a movable frame, a detecting cantilever beam, mass blocks, a laser light source, a photoelectric conversion device and a signal detecting module. The micromachining gyroscope is symmetrical in the whole structure, two mass blocks are opposite in the driving directions, differential coupling output is realized, the structure is reasonable and compact, the nanometer optical grating is adopted, the anti-electromagnetic interference capacity is strong, and the gyroscope has the advantages of high sensitivity and good reliability.

Description

technical field [0001] The invention relates to the related field of micro-inertial navigation technology, in particular to a nano-grating-based micro-mechanical gyroscope. Background technique [0002] At present, the commonly used detection methods of MEMS gyroscopes are capacitive and piezoresistive. The piezoresistive is based on the principle of piezoresistive effect of highly doped silicon. Strong dependence, the bridge detection circuit composed of pressure sensitive devices will also cause sensitivity drift due to temperature changes; the improvement of capacitive precision is to increase the capacitance area, due to the miniaturization of the device, its accuracy depends on the effective capacitance It is difficult to improve due to the reduction of the area. [0003] The measurement of the angular velocity of the micromechanical gyroscope is completed by the force-electricity conversion of the detection device. The main method is the micro-displacement detection c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5726
CPCG01C19/5726G01C19/5733G01C19/5747
Inventor 李孟委王莉朱京白晓晓王琪禇伟航刘俊
Owner ZHONGBEI UNIV
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