A differential pressure sensing method and sensor thereof

Abstract

The invention discloses a differential pressure sensing method and a sensor thereof. According to the differential pressure sensing method, pressure produced through detection fluid impacts one surface of an elastic membrane (113), meanwhile narrow-spectrum laser irradiates the other surface of the elastic membrane (113), the elastic membrane (113) can deform, the output light intensity of a receiving optical fiber (41) can change after the elastic membrane (113) deforms, and pressure variation caused by the fluid on the elastic membrane (113) is judged by detecting the variation of the output light intensity of the receiving optical fiber (42). By the adoption of the method, the sensor is high in sensing accuracy, reliable in performance, simple in structure, low in volume and mass and low in manufacturing cost.

Description

technical field [0001] The invention relates to a differential pressure sensing method and a sensor thereof, belonging to the technical field of sensors. Background technique [0002] Differential Pressure Sensor DPS (Differential Pressure Sensor) is a sensor used to measure the difference between two pressures, usually used to measure the pressure difference between the front and back ends of a device or component. In recent years, differential pressure sensors have been widely used in many high-precision measurement occasions such as micro-flow measurement, leak testing, clean room monitoring, environmental tightness testing, gas flow measurement, and liquid level measurement. [0003] At present, the research on differential pressure sensors at home and abroad mainly focuses on the traditional piezoresistive differential pressure sensors and capacitive differential pressure sensors. The piezoresistive differential pressure sensor has a simple structure and a flat working...

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Problems solved by technology

[0008] In order to solve the problems of complex sensor structure, unreliable performance, high processing cost and large volume quality, it is proposed to adopt such a differential pressure sensing method and its sensor. The main point of this sensing method is that it is used to measure The detection fluid (such as hydraulic oil) that generates pressure from the measured object is used for sensing, so that the pressure generated by the detection fluid impacts one side of an elastic diaphragm to deform the elastic diaphragm; the other side of the elastic diaphragm is used The narrow-band laser in the incident fiber is irradiated, and the receiving fiber is used to receive the reflected light; in this way, when the elastic diaphragm is deformed, due to the change of the reflection angle, the reflected light changes accordingly, resulting in the output light intensity of the receiving fiber. In this way, the change in pressure caused by the detection fluid to the elastic diaphragm can be judged by detecting the change in the output light intensity of the receiving optical fiber

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