Unlock instant, AI-driven research and patent intelligence for your innovation.

Fabrication method of sub-wavelength rectangular single-period grating structure and even-numbered beam splitter

A grating structure and even-numbered beam splitting technology, which is applied in diffraction gratings, instruments, optics, etc., can solve problems such as difficult production, complex structure, and low zero-order diffraction efficiency, and achieve easy production and replication, simple structure, and strong practicability Effect

Active Publication Date: 2016-04-06
SHENZHEN UNIV
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Ordinary grating design theory - scalar diffraction theory, due to its design limitations, cannot produce the effect of high diffraction efficiency and even equal light intensity beam splitting
[0004] The Chinese patent with the notification number CN201107422Y proposes a Damman grating structure even-numbered beam splitter. Although it achieves low zero-order diffraction efficiency and better even-numbered beam splitting effect, it has a complex periodic rectangular structure and a relatively complicated structure. It is difficult to produce, which is not conducive to copying and application

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Fabrication method of sub-wavelength rectangular single-period grating structure and even-numbered beam splitter
  • Fabrication method of sub-wavelength rectangular single-period grating structure and even-numbered beam splitter
  • Fabrication method of sub-wavelength rectangular single-period grating structure and even-numbered beam splitter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] The method for fabricating the sub-wavelength rectangular single-period grating structure proposed by the present invention will be described below with examples.

[0046] In this embodiment, a four-beam splitter is designed for incident polarized light with an incident wavelength of 118.83um. The material of the grating substrate is high-resistance silicon, which absorbs less incident waves with a wavelength of 118.83um and has a refractive index of 3.42. In this embodiment, the number of beam splits is four, that is, N=4.

[0047] Thus, the evaluation function can be constructed as:

[0048] g ( x ) = 0.1 × Σ m = - 2 , ...

Embodiment 2

[0058] Utilizing the manufacturing method of the sub-wavelength rectangular single-period grating structure proposed by the present invention, the device structure simulation and optimization of the even-numbered beam splitters of other incident frequencies were carried out, and the incident polarized waves of different wavelengths were optimized into two beams, four beams The grating structure parameters (ridge width A, groove width B and depth H) of beams and six split beams are shown in Table 2.

[0059] Table 2 The optimization results of even-numbered beam splitter design for incident polarized waves of different wavelengths

[0060]

[0061]

[0062] It can be seen that the sub-wavelength rectangular single-period grating structure obtained by using the method for manufacturing the sub-wavelength rectangular single-period grating structure proposed by the present invention can achieve a relatively ideal even beam splitting effect for different incident wave waveleng...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a method for making a sub-wavelength rectangular single-cycle grating structure. The method for making the sub-wavelength rectangular single-cycle grating structure is used for making the sub-wavelength rectangular single-cycle grating structure which can achieve even-number beam splitting. The method for making the sub-wavelength rectangular single-cycle grating structure comprises the following steps of S11, determining the wavelength of an incident wave and the refractive index of a material of a grating substrate, S13, building an evaluation function according to a target even-number beam splitting number, S15, carrying out optimization to obtain the ridge width, the groove width and the depth of the sub-wavelength rectangular single-cycle grating structure by using the rigorous coupled wave theory and a global optimization algorithm and combining the evaluation function, and S17, making the sub-wavelength rectangular single-cycle grating structure according to the ridge width, the groove width and the depth. According to the obtained sub-wavelength rectangular single-cycle grating structure, the ideal even-number beam splitting effect on different wavelengths of the incident waves can be achieved; meanwhile, the even-number beam splitter with the sub-wavelength rectangular single-cycle grating structure can effectively achieve even-number beam splitting, is of a periodic rectangular structure, and is easy to produce and copy and high in practicability.

Description

technical field [0001] The invention relates to a diffractive optical device, in particular to a manufacturing method of a sub-wavelength rectangular single-period grating structure capable of realizing even beam splitting and an even beam splitter. Background technique [0002] A beam splitter is an important optical component in an optical system. In many technical fields such as optical fiber communication, optical computing, image processing, and optical disc storage, it is often necessary to use a beam splitter to convert a single signal into multiple output signals. The even-numbered beam splitter converts a beam of incident electromagnetic waves into an even-numbered beam output, that is, 1x2, 1x4, 1x6..., which has the advantages of symmetrical light splitting effect and high light energy utilization rate, so that the even-numbered beam splitter has great advantages in building optical systems. Significance. [0003] Ordinary grating design theory - scalar diffracti...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18G02B27/10
Inventor 徐平黄海漩杨拓
Owner SHENZHEN UNIV