Fabrication method of sub-wavelength rectangular single-period grating structure and even-numbered beam splitter
A grating structure and even-numbered beam splitting technology, which is applied in diffraction gratings, instruments, optics, etc., can solve problems such as difficult production, complex structure, and low zero-order diffraction efficiency, and achieve easy production and replication, simple structure, and strong practicability Effect
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Embodiment 1
[0045] The method for fabricating the sub-wavelength rectangular single-period grating structure proposed by the present invention will be described below with examples.
[0046] In this embodiment, a four-beam splitter is designed for incident polarized light with an incident wavelength of 118.83um. The material of the grating substrate is high-resistance silicon, which absorbs less incident waves with a wavelength of 118.83um and has a refractive index of 3.42. In this embodiment, the number of beam splits is four, that is, N=4.
[0047] Thus, the evaluation function can be constructed as:
[0048] g ( x ) = 0.1 × Σ m = - 2 , ...
Embodiment 2
[0058] Utilizing the manufacturing method of the sub-wavelength rectangular single-period grating structure proposed by the present invention, the device structure simulation and optimization of the even-numbered beam splitters of other incident frequencies were carried out, and the incident polarized waves of different wavelengths were optimized into two beams, four beams The grating structure parameters (ridge width A, groove width B and depth H) of beams and six split beams are shown in Table 2.
[0059] Table 2 The optimization results of even-numbered beam splitter design for incident polarized waves of different wavelengths
[0060]
[0061]
[0062] It can be seen that the sub-wavelength rectangular single-period grating structure obtained by using the method for manufacturing the sub-wavelength rectangular single-period grating structure proposed by the present invention can achieve a relatively ideal even beam splitting effect for different incident wave waveleng...
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