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Surface Acoustic Wave Based Sensing Vibration Sensor with Temperature Compensation

A technology of vibration sensor and surface acoustic wave, which is applied in the direction of measuring ultrasonic/sonic/infrasonic waves, instruments, measuring devices, etc. It can solve the problems that it cannot be used to monitor vibration and has no temperature compensation function, and achieves simple structure and low production cost. , the effect of high measurement accuracy

Inactive Publication Date: 2018-04-10
CHANGZHOU SMARTSAW SENSING TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although it can be used in this application, this design can only be used to monitor the occurrence of vibration at a specific frequency, not can be used to monitor vibration in a wide frequency range, and does not have temperature compensation function

Method used

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  • Surface Acoustic Wave Based Sensing Vibration Sensor with Temperature Compensation
  • Surface Acoustic Wave Based Sensing Vibration Sensor with Temperature Compensation
  • Surface Acoustic Wave Based Sensing Vibration Sensor with Temperature Compensation

Examples

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings and given embodiments, but is not limited thereto.

[0026] Such as figure 1 , 2 , 3, and 4, a temperature-compensated sensing vibration sensor based on surface acoustic waves includes a housing 1 and a housing cover 2, and the housing 1 and the housing cover 2 are hermetically connected, and it:

[0027] a. It also includes a base 8, a piezoelectric assembly 5 and three surface acoustic wave resonators 4, and the base 8 is fixed on the bottom of the housing 1;

[0028] b, the piezoelectric assembly 5 is composed of a piezoelectric film 6 and a piezoelectric substrate 3, the piezoelectric film is arranged on the upper surface of the piezoelectric substrate 3, one end of the piezoelectric substrate 3 is a fixed end, and the other One end is a cantilevered end, and one end of the piezoelectric film 6 and the fixed end of the piezoelectric substrate 3 are fixed on the base...

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Abstract

The invention relates to a sensing vibration sensor with temperature compensation based on acoustic surface waves. The sensor comprises a shell and a shell cover which are connected in a sealing mode and further comprises a base, a piezoelectric assembly and three acoustic surface wave resonators with different resonant frequencies. The base is fixed at the bottom inside the shell, the piezoelectric assembly is composed of a piezoelectric film and a piezoelectric substrate, the piezoelectric film is arranged on the upper surface of the piezoelectric substrate, one end of the piezoelectric substrate is a fixed end, the other end of the piezoelectric substrate is an overhanging end, one end of the piezoelectric film and the fixed end of the piezoelectric substrate are both fixed to the base, and are higher than the bottom face in the shell, at least one acoustic surface wave resonator is arranged on the upper surface of the piezoelectric film, and the surplus acoustic surface wave resonators are arranged between the piezoelectric film and the piezoelectric substrate, the acoustic surface waves generated by the three acoustic surface wave resonators are spread in the direction y, and the direction y is the direction perpendicular to the extending direction from the fixed end of the piezoelectric substrate to the overhanging end of the piezoelectric substrate. The sensing vibration sensor can monitor vibration and temperature at the same time.

Description

technical field [0001] The invention specifically relates to a surface acoustic wave based sensing vibration sensor with temperature compensation. Background technique [0002] Existing real-time structural health monitoring (SHM) is key to the control of many industrial processes. In many industrial applications, it is very important to monitor the health of mechanical components in motion, such as the real-time monitoring of the vibration status of loaded bearings of high-speed train wheels. Replacing the current Schedule Based Maintenance (SBM) with Condition Based Maintenance (CBM) is an effective way to reduce maintenance and operating costs. In all of these cases, real-time health monitoring with multiple types of sensors is key to maximizing continuous uptime. The compact, wireless and passive sensors are especially suitable for continuous and real-time real-time structural health monitoring in hazardous environments, such as outdoor harsh weather environments, high...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H11/08
Inventor 高翔刘文
Owner CHANGZHOU SMARTSAW SENSING TECH
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