Electret based mems electric field energy harvester
A technology of electric field energy and collectors, which is applied to piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, generators/motors, etc., and can solve problems such as limited application range, large environmental impact, and power outages , to achieve the effect of facilitating system integration and mass production, enhancing sensitivity and output energy, and reducing costs
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[0018] The present invention will be further described below in conjunction with the embodiments and the accompanying drawings.
[0019] A kind of electret-based MEMS electric field energy harvester that the present invention proposes, such as figure 1 As shown, it is mainly composed of an insulating substrate, a piezoelectric wire, a supporting surface, and an electret.
[0020] The insulating substrate is placed horizontally at the bottom of the sensor, and the piezoelectric wire is placed parallel to the insulating substrate.
[0021] The supporting surface is made of insulating material, fixed vertically on the insulating substrate, and keeps a certain distance from the piezoelectric wire.
[0022] The electret adheres to the support surface, and is adhered with electret tape or liquid electret.
[0023] The piezoelectric wire is connected to an external circuit.
[0024] The energy harvester works as follows:
[0025] After the electret on the support surface passes t...
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