Thin polymer film preparation process

Abstract

A thin polymer film preparation process includes the steps of firstly, conducting pre-coating, wherein a carrier substrate is coated with a polymer precursor solution to form a primary body film; secondly, adjusting the thick centrifugal edge, wherein the carrier substrate is made to do high-speed centrifugal movement through a spin coating device, the solution on the thick edge portion of the primary body film is thrown out in the centrifugation process, and the edge of the primary body film on the carrier substrate is thinned; thirdly, solidifying the primary body film with the centrifugal thick edge adjusted in the second step and the carrier substrate together, and separating the thin film and the carrier substrate which are solidified to obtain a self-supported finished thin polymer film. The polymer precursor solution in the first step is a high-viscosity solution, wherein the viscosity of the solution ranges from 800 cp to 20000 cp. The centrifugal rotating speed of a centrifugation device in the second step ranges from 100 r / min to 10000 r / min, and the levelness of a centrifugation platform is smaller than 5 mm / m. The thin polymer film preparation process can effectively solve the thick edge problem generated in the film formation process of the high-viscosity polymer solution, and film forming uniformity is improved.

Description

technical field [0001] The invention relates to the technical field of film manufacture, in particular to a preparation process of a polymer film. Background technique [0002] Polymer films are widely used in the field of precision electronics manufacturing, such as flat panel displays, photovoltaic cells, and communication equipment, due to their advantages such as good toughness, high temperature resistance, and excellent insulation. A common way to prepare polymer films is to coat a polymer solution on a mold, cure the solution into a film, and finally release the film from the mold. The commonly used coating method is knife coating, but this process has the defect of uneven coating of polymer film. [0003] In the scraping process, the scraping solution flows to the edge of the scraper under the action of gravity, and the scraper moves relative to the carrier substrate so that the scraping solution forms a rectangular liquid film on the carrier substrate along with the...

AI Technical Summary

Problems solved by technology

The thick edge phenomenon will bring many problems to the subsequent electronic manufacturing process, such as the substrate warpage caused by the thick edge, the alignment misalignment of the edge area caused by the thick edge during the photolithography process, and the device size deviation, etc.

[0004] Although in the prior art, there are also measures to control the uniformity of the film, but to make the specific preparation process meet the needs of production is not the superposition of simple technical effects, but to meet the actual requirements of production, which can overcome the problem of thick edges and obtain uniformity. It is not easy to complete the thin film in a relatively short period of time. Often some processing methods meet one of the requirements but do not meet other requirements.

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