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Single-needle type micron-sized object picking and releasing device and method

A pick-and-place device, micron-level technology, used in workpiece clamping devices, manufacturing tools, etc., can solve problems such as failure of micron-connected object picking tasks, achieve stable release, solve release problems, and compliant picking effects

Active Publication Date: 2015-01-21
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention is to solve the problem that the local high stress generated by traditional mechanical clamping and vacuum adsorption leads to the failure of picking up micron-sized objects, and further provides a single-needle micron-level object pick-and-place device and method

Method used

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  • Single-needle type micron-sized object picking and releasing device and method
  • Single-needle type micron-sized object picking and releasing device and method

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specific Embodiment approach 1

[0016] Specific implementation mode one: combine figure 1 and figure 2 Explain that a single-needle micron-scale object pick-and-place device in this embodiment includes No. 2 three-axis electric translation platform 1-1, vibration isolation table 1-4, No. 1 three-axis electric displacement platform 1-10, No. 3 three-axis Axis electric translation stage 1-13, self-tightening chuck 2-2, probe 2-3, screw micrometer head 2-4, thermistor element 2-5, capillary 2-6 and capillary clamp 2-8;

[0017] The No. 1 three-axis electric translation stage 1-10 includes a second connecting plate 1-6, a probe driving motor 1-7, a first connecting plate 1-8, a micrometer fixture 1-9 and a first connecting seat 1-14 ; No. 2 three-axis electric translation stage 1-1 includes No. 1 microscope 1-2, No. 1 microscope fixture 1-3 and second connection seat 1-15; No. 3 three-axis electric translation stage 1-13 includes No. 2 microscope 1 -12, No. 2 microscope fixture 1-11 and the third connecting s...

specific Embodiment approach 2

[0020] Specific implementation mode two: combination figure 2 Note that the capillary 2-6 of this embodiment is bonded to the lower part of the capillary holder 2-8. With such arrangement, the connection is convenient and reliable, and it is convenient to use. Others are the same as in the first embodiment.

specific Embodiment approach 3

[0021] Specific implementation mode three: combination figure 2 Note that the thermistor element 2-5 in this embodiment is a thin-film platinum resistance element. In this way, the liquid medium between the micro-object and the probe disappears, and then the separation of the micro-object and the probe is realized. A PT100 with an overall size of 2mm×2mm×1mm (length×width×height) and a maximum operating temperature of 500°C can be selected. Type thin film platinum resistance element. Others are the same as in the first or second embodiment.

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Abstract

The invention discloses a single-needle type micron-sized object picking and releasing device and method and relates to a device and method for picking and releasing a micron-sized object gently to solve the problem that micron-sized object picking operation fails due to high local stress generated through traditional mechanical clamping and vacuum absorption. The device comprises a second three-axis electric horizontally-moving table, a vibration isolation table, a first three-axis electric horizontally-moving table, a third three-axis electric horizontally-moving table, a self-tightening chuck, a probe, a spiral micrometer head, a thermistor element, a capillary tube and a capillary tube clamp, wherein the first three-axis electric horizontally-moving table comprises a second connecting plate, a probe driving motor, a first connecting plate, a micrometer head clamp and a first connecting base, the second three-axis electric horizontally-moving table comprises a first microscope, a first microscope clamp and a second connecting base, and the third three-axis electric horizontally-moving table comprises a second microscope, a second microscope clamp and a third connecting base. The device and method are used for gentle picking, transferring and releasing of micron-sized objects.

Description

technical field [0001] The invention relates to a device and method for softly picking up and releasing micron-level objects. Background technique [0002] For the operation of micro-objects (0.1μm-1mm) in micro-assembly, there are mainly two methods of clamping and adsorption. The clamping type is mainly a mechanical clamp with different driving principles (piezoelectric drive, electrostatic drive, electrothermal drive, electromagnetic drive, etc.), while the adsorption type mainly uses vacuum negative pressure adsorption. Due to the strong size effect of micro-sized objects, the adhesion force plays a dominant role relative to gravity, which affects the smooth progress of the operation task, and the micro-object will stick to the end of the gripper and cause the failure of the operation task; in addition, the micro-object is thin and brittle , the clamping force and adsorption force need to be strictly controlled, otherwise the micro-objects will be deformed or even damag...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25B11/00
CPCB25B11/00
Inventor 荣伟彬范增华王乐锋孙立宁
Owner HARBIN INST OF TECH
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