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A method of transferring CVD graphene on the surface of metal copper to the surface of a target substrate

A target substrate, graphene technology, applied in the field of materials, can solve the problems of resource waste cost, copper can not be directly reused, etc., to achieve the effect of reducing preparation costs, realizing green and efficient transfer, and reducing production costs

Active Publication Date: 2017-03-01
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The above-mentioned transfer method not only needs to use a large amount of solvents such as PMMA and acetone, but also the copper removed by corrosion cannot be directly reused, resulting in waste of resources and high cost

Method used

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  • A method of transferring CVD graphene on the surface of metal copper to the surface of a target substrate
  • A method of transferring CVD graphene on the surface of metal copper to the surface of a target substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Embodiment 1: The target substrate is made of PET film, the copper electrolyte is made of copper sulfate, and the cathode is made of glassy carbon sheet, that is, the graphene deposited on the surface of metal copper by chemical vapor phase is transferred to the surface of the PET film in a green and efficient manner. The specific steps are as follows figure 2 as shown, figure 2 The process flow chart of graphene transfer according to embodiment 1 of the present invention is shown, including:

[0042] Weigh 10g of copper sulfate and 4g of agar powder, add 100ml of deionized water, heat and stir to make a sol solution, and naturally cool it to form an agar gel of copper sulfate; copper foil is put into a CVD furnace and heated under 10sccm hydrogen and 2sccm methane In a mixed atmosphere, use chemical vapor deposition to grow graphene on the copper surface at a high temperature of 1000°C; use a glassy carbon sheet as the cathode, and copper foil with graphene grown on ...

Embodiment 2

[0043] Embodiment 2: The target substrate is a PET film, the copper electrolyte is copper nitrate, and the cathode is a glassy carbon sheet, that is, the graphene chemically vapor deposited on the surface of the metal copper is transferred to the surface of the PET film in a green and efficient manner. The specific steps are as follows:

[0044] Take by weighing 10g copper nitrate and 4g agar powder, add 100ml deionized water, heat and stir to make sol solution, it is naturally cooled to form the agar gel of copper nitrate; Copper foil is put into CVD furnace, under 10sccm hydrogen and 2sccm methane In a mixed atmosphere, use chemical vapor deposition to grow graphene on the copper surface at a high temperature of 1000°C; use a glassy carbon sheet as the cathode, and copper foil with graphene grown on the surface as the anode, and the copper nitrate agar gel prepared above is the copper electrolyte. , apply a DC voltage of 0.7V to electrolyze until the current is zero, realize ...

Embodiment 3

[0045] Embodiment 3: The target substrate adopts PET film, the copper electrolyte adopts copper acetate, and the cathode adopts a glassy carbon sheet, that is, the graphene deposited by chemical vapor phase deposition on the surface of metal copper is transferred to the surface of the PET film in a green and efficient manner, and the specific steps are as follows:

[0046] Weigh 10g of copper acetate and 4g of agar powder, add 100ml of deionized water, heat and stir to make a sol solution, and naturally cool it to form an agar gel of copper acetate; copper foil is put into a CVD furnace and heated in 10sccm hydrogen and 2sccm methane In a mixed atmosphere, use chemical vapor deposition to grow graphene on the copper surface at a high temperature of 1000°C; use a glassy carbon sheet as the cathode, and copper foil with graphene grown on the surface as the anode, and the copper acetate agar gel prepared above is the copper electrolyte. , apply a DC voltage of 0.7V to electrolyze ...

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Abstract

The invention discloses a method for transferring chemical vapor deposition graphene on a metal copper surface to a target substrate surface, and belongs to the technical field of materials. The method comprises the following steps: firstly, growing on a copper foil surface through a chemical vapor deposition method, so as to obtain graphene; by taking a copper foil as an anode, a glassy carbon sheet as a cathode, and agar gel of copper sulfate as solid electrolyte, dissolving the copper foil by using an electrochemical method, depositing on the surface of a glassy carbon electrode and forming a copper film; and finally, dissolving and removing the agar gel in hot water to obtain a graphene film which is transferred to the target substrate surface, and obtaining the metal copper foil on the surface of the glassy carbon electrode for growth of the graphene. By using the method, green and efficient transfer of the graphene on the surfaces of a plurality of target substrates can be achieved; cyclic utilization of the metal copper can be achieved; the preparation cost of the graphene film is reduced; and large-scale application of the graphene in the fields of conductive films and the like is promoted.

Description

technical field [0001] The invention belongs to the technical field of materials, in particular to a method for transferring graphene deposited on the surface of metal copper by chemical vapor deposition (CVD) to the surface of a target substrate. Background technique [0002] In 2004, Professor Geim of the University of Manchester prepared graphene for the first time [K.S.Novoselov, A.K.Geim, S.V.Morozov, D.Jiang, Y.Zhang, S.V.Dubonos, I.V.Grigorieva, A.A.Firsov, Science 2004, 306, 666.]. Graphene is a hexagonal honeycomb-like two-dimensional structure composed of a single layer of carbon atoms. The intrinsic electron mobility of graphene film can reach 200000cm at room temperature 2 / Vs【K.I.Bolotin, K.J.Sikes, Z.Jiang, M.Klima, G.Fudenberg, J.Hone, P.Kim, H.L.Stormer, Solid State Communications 2008, 146, 351.】, has excellent electrical properties. In addition, graphene has extremely high light transmittance in the entire visible light region, and studies have found that...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/01C23C16/26C23C16/56C25F3/02
CPCC23C16/01C23C16/26C25F3/02
Inventor 张大勇金智史敬元麻芃王选芸
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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