Electric fuse structure

A technology of electric fuses and isolation structures, applied in circuits, electrical components, electric solid devices, etc., can solve the problems that the edge roughness of fuse lines is not easy to be controlled, and electric fuses cannot be obtained

Active Publication Date: 2018-02-16
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The problem to be solved by the present invention is that in the process of forming an electric fuse, the line edge roughness of the fuse is not easy to be controlled, and an electric fuse with satisfactory line edge roughness cannot be obtained.

Method used

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  • Electric fuse structure
  • Electric fuse structure
  • Electric fuse structure

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Embodiment Construction

[0030] In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0031] refer to figure 2 , the electric fuse structure of this embodiment includes:

[0032] A substrate 100, a shallow trench isolation structure 101 is formed in the substrate 100, the upper surface of the shallow trench isolation structure 101 is substantially flat with the upper surface of the substrate 100;

[0033] The electric fuse 102 located on the shallow trench isolation structure 101, the electric fuse 102 includes an anode 121, a cathode 122, and a fuse 123 located between the anode 121 and the cathode 122, the projection of the electric fuse 102 on the upper surface of the substrate 100 Located within the range of the upper surface of the shallow trench isolation structure 101;

[0034] The fuse 123 includes a main body 13...

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PUM

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Abstract

An electric fuse structure, comprising: a substrate in which a shallow trench isolation structure is formed; an electric fuse located on the shallow trench isolation structure, the electric fuse including an anode, a cathode, and a The fuse between the anode and the cathode; the fuse includes a body part and a plurality of protrusions located on the side wall of the body part and distributed along the length direction of the body part, and located on the same side wall of the body part There is a gap between two adjacent protrusions. In this technical solution, the roughness of the line edge of the fuse is increased, the process of forming the fuse including a plurality of protrusions is controllable, and the process of using the protrusions to increase the line roughness of the fuse is controllable, and it is possible to obtain Electrical fuses with required line edge roughness.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an electric fuse structure. Background technique [0002] With the miniaturization and complexity of the semiconductor process, semiconductor components are easily affected by various defects or impurities, and the failure of a single or several metal interconnects, diodes or transistors often leads to the failure of the entire chip. To solve this problem, fusible links (fuse links), that is, fuses (fuse), are usually provided in integrated circuits to repair defective circuits and improve the yield of integrated circuit chips. From the working mode, fuses can be divided into two types: thermal fuses and electrical fuses. Among them, the electric fuse uses the principle of electro-migration to make the electric fuse open. [0003] refer to figure 1 , figure 1 It is a schematic diagram of the three-dimensional structure of the existing electric fuse. The existing electr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/525
Inventor 廖淼
Owner SEMICON MFG INT (SHANGHAI) CORP
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