Planar lens unit based on dielectric material, planar lens and preparation method

Abstract

The invention provides a planar lens unit based on dielectric material, a planar lens and a preparation method. The unit comprises an antenna made of dielectric material with high refractivity, a silica filling layer, a silver mirror and a silica substrate. The planar lens comprises the planar lens units distributed about the center, and the antennas of the planar lens units are distributed on the axis X regularly and are distributed symmetric about the axis y when y equals to zero. The method includes firstly, covering the silica substrate with a layer of silver film, and covering the surface of the silver film with the filling layer of silica and a silicon film through electron beam vapor deposition continuously; secondly, coating the silicon film with photoresist, and completing the etching and developing of the photoresist by the electron beam exposure technology; thirdly, etching the silicon film by the reactive ion beam etching technology; fourthly, performing peeling to obtain the finished nano silicon antenna. Thus, the focusing efficiency can be improved by one order of magnitude, and the high practical application value is provided.

Description

technical field [0001] The invention relates to the field of integrated optics, in particular to a plane lens based on a dielectric material. Background technique [0002] In an optical system, mirrors with curved surfaces, that is, spherical lenses, are usually required for focusing and imaging. Traditional lenses are generally made of glass or silica gel materials, and their geometric shape is a curved surface with thin edges and thick middle, or thick edges and thin ends. Spherical lens is the simplest optical element for optical imaging. In order to realize a large field of view aperture optical system and obtain a large numerical aperture, the lens must be made very large, so that the quality and volume of the obtained lens will be large. [0003] One of the alternative lens technologies is the Fresnel lens. Compared with the traditional spherical lens, the Fresnel lens achieves the same optical effect by dividing the lens into a series of theoretically infinitely man...

AI Technical Summary

Problems solved by technology

Although this kind of scheme avoids the complicated level of preparation, the working efficiency of the metasurface composed of this metal is still limited due to the ohmic loss of the metal.

Images