Planar lens unit based on dielectric material, planar lens and preparation method

A technology of flat lens and dielectric material, which is applied in the field of integrated optics, can solve the problems of limiting the work efficiency of metasurfaces, achieve the effect of focusing imaging and improving focusing efficiency

Inactive Publication Date: 2015-07-01
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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Problems solved by technology

Although this kind of scheme avoids the complicated level of preparation, the working efficienc

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  • Planar lens unit based on dielectric material, planar lens and preparation method
  • Planar lens unit based on dielectric material, planar lens and preparation method
  • Planar lens unit based on dielectric material, planar lens and preparation method

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[0029] The present invention will be further described below in conjunction with the accompanying drawings.

[0030] In view of the shortcomings of existing optical lenses, in order to effectively reduce the volume and weight of the lens, the optical lens can be prepared on the micro-nano scale by using the metasurface. Monochromatic spherical aberration due to shape. Moreover, in order to avoid the low efficiency of the metasurface caused by the loss of metal, a metasurface planar cylindrical mirror (other lens designs such as planar convex lens, planar concave lens, planar axicon, etc.) design based on dielectric materials is proposed. This kind of planar lens has a higher working efficiency than the metal material metasurface of the dielectric material working in the transmission mode, and has a higher working efficiency working in the reflection mode. This design works in the near-infrared band, but the design can be extended to the entire electromagnetic band. In this d...

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Abstract

The invention provides a planar lens unit based on dielectric material, a planar lens and a preparation method. The unit comprises an antenna made of dielectric material with high refractivity, a silica filling layer, a silver mirror and a silica substrate. The planar lens comprises the planar lens units distributed about the center, and the antennas of the planar lens units are distributed on the axis X regularly and are distributed symmetric about the axis y when y equals to zero. The method includes firstly, covering the silica substrate with a layer of silver film, and covering the surface of the silver film with the filling layer of silica and a silicon film through electron beam vapor deposition continuously; secondly, coating the silicon film with photoresist, and completing the etching and developing of the photoresist by the electron beam exposure technology; thirdly, etching the silicon film by the reactive ion beam etching technology; fourthly, performing peeling to obtain the finished nano silicon antenna. Thus, the focusing efficiency can be improved by one order of magnitude, and the high practical application value is provided.

Description

technical field [0001] The invention relates to the field of integrated optics, in particular to a plane lens based on a dielectric material. Background technique [0002] In an optical system, mirrors with curved surfaces, that is, spherical lenses, are usually required for focusing and imaging. Traditional lenses are generally made of glass or silica gel materials, and their geometric shape is a curved surface with thin edges and thick middle, or thick edges and thin ends. Spherical lens is the simplest optical element for optical imaging. In order to realize a large field of view aperture optical system and obtain a large numerical aperture, the lens must be made very large, so that the quality and volume of the obtained lens will be large. [0003] One of the alternative lens technologies is the Fresnel lens. Compared with the traditional spherical lens, the Fresnel lens achieves the same optical effect by dividing the lens into a series of theoretically infinitely man...

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Application Information

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IPC IPC(8): G02B3/00
CPCG02B3/00
Inventor 肖淑敏钟建文宋清海
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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