A coating machine and its control method
A coating machine and coating technology, which is applied to the device for coating liquid on the surface, the coating, the use of mechanical devices, etc. inconsistency etc.
Inactive Publication Date: 2017-06-30
HEFEI BOE OPTOELECTRONICS TECH +1
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Problems solved by technology
[0002] The coating machine is a process equipment used to evenly coat photoresist on the glass substrate. The coating platform is used to place the glass substrate during coating. If a certain support point of the coating platform changes in height, Then the coating platform will be inclined, and the levelness will become poor, which will cause inconsistent coating gaps during coating, resulting in poor coating uniformity.
[0003] In the existing coating machine structure, it is impossible to monitor the height change of the support point of the coating platform, and it is also difficult to adjust the level of the platform
The levelness of the coating platform cannot be monitored in real time, and even if the coating platform is tilted, it cannot be found in time; there is no quantitative standard for the adjustment of the coating platform, and it can only be adjusted manually by feeling, which is difficult to adjust, and it is difficult to guarantee the levelness after adjustment
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[0039] In order to improve the coating effect of the coating machine, the embodiment of the present invention provides a coating machine and its control method. In the technical solution of the embodiment of the present invention, the levelness of the coating platform is adjusted by using a height adjustment device, It avoids inclination during coating and effectively improves the coating effect. In order to make the purpose, technical solution and advantages of the present invention clearer, the following non-limiting examples are taken as examples to further describe the present invention in detail.
[0040] together with reference figure 1 and figure 2 , figure 1 A top view of the coating machine provided by the embodiment of the present invention is shown; figure 2 A schematic structural view showing the height adjustment device of the coating machine provided by the embodiment of the present invention
[0041] The embodiment of the present invention provides a kind o...
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The invention relates to the technical field of display device manufacturing, and discloses a coating machine and a control method thereof. The coating machine includes: a coating platform for holding a substrate; a support device for supporting the coating platform, the support device is a height-adjustable support device; a detection device for detecting the levelness of a support plane formed by the support device; a control device When the detected levelness of the support plane exceeds the set levelness threshold, the driving device is controlled to adjust the support device until the levelness of the support plane is within the set levelness threshold. In the above technical solution, the coating platform is supported by the height adjustment device, and the support height of the support platform is detected by the detection device. At the same time, the support height of the height adjustment device is controlled by the control device through the detection result of the detection device, thereby ensuring During coating, the levelness of the plane of the coating platform supporting the substrate avoids the situation that the coating platform is inclined during coating, thereby improving the coating effect.
Description
technical field [0001] The present invention relates to the technical field of display device manufacturing, in particular to a coating machine and a control method thereof. Background technique [0002] The coating machine is a process equipment used to evenly coat photoresist on the glass substrate. The coating platform is used to place the glass substrate during coating. If a certain support point of the coating platform changes in height, Then the coating platform will be inclined, and the levelness will become poor, which will cause inconsistent coating gaps during coating, resulting in poor coating uniformity. [0003] In the existing coating machine structure, it is impossible to monitor the height change of the supporting point of the coating platform, and it is also difficult to adjust the levelness of the platform. The levelness of the coating platform cannot be monitored in real time, and even if the coating platform is tilted, it cannot be found in time; there i...
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IPC IPC(8): B05C13/02
CPCG01B5/061G03F7/16H01L21/6715H01L21/67253H01L21/68764
Inventor 李志强尹冬冬成学佩龚清华伍岭
Owner HEFEI BOE OPTOELECTRONICS TECH