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Diffusion source coating device

A technology of coating device and diffusion source, which is applied in the direction of surface coating liquid device, diffusion/doping, coating, etc., can solve the problems of waste of source materials, process cost, low processing efficiency, and poor coating effect, etc. To achieve the effect of improving the coating effect and increasing the utilization rate

Inactive Publication Date: 2018-10-23
SHANGHAI HANS NEW ENERGY TECH
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0004] Based on this, it is necessary to provide a diffusion source coating device for the problems of poor coating effect, low processing efficiency, waste of source materials and high process cost of the above-mentioned liquid diffusion source coating method

Method used

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Embodiment Construction

[0022] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0023] Such as figure 1 As shown, the diffusion source coating device of one embodiment is used to coat samples. The diffusion source coating device includes a rotating mechanism 10, a fixed frame 20, a bracket 30 and a nozzle array 40. The rotating mechanism 10 is connected to the fixed frame 20, and the bracket 30 is connected with the rotating mechanism 10, and the nozzle array 40 is connected with the support 30. The nozzle array 40 includes a plurality of nozzles 400, and the plurality of nozzles 400 are arranged on the support 30. When the diffusion source coating device coats the sample, the...

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Abstract

The invention relates to a diffusion source coating device. The diffusion source coating device is used for coating a sample and comprises a rotary mechanism, a fixed frame, a support and a nozzle array, wherein the rotary mechanism is connected with the fixed frame; the support is connected with the rotary mechanism; the nozzle array is connected with the support and comprises a plurality of nozzles arranged on the support. When the diffusion source coating device is used for coating the sample, the rotary mechanism drives the support to rotate to enable the nozzles on the support to rotationally perform diffusion source coating on the sample. According to the diffusion source coating device, the coating effect and the processing efficiency can be improved, diffusion source materials are saved and the process cost is lowered.

Description

technical field [0001] The invention relates to the field of coating equipment, in particular to a diffusion source coating device. Background technique [0002] The diffusion process and the coating source technology of the diffusion source have been widely used in the fields of microelectronics and photovoltaics. Diffusion sources can be divided into gaseous sources, solid sources and liquid sources. Among them, liquid diffusion sources have the advantages of simple process, convenient equipment operation and low operating risk factor. In addition, applying the coating source technology of liquid diffusion sources to high-efficiency solar cells can significantly reduce equipment hardware requirements while meeting process technical requirements, thereby reducing equipment costs and subsequent maintenance costs. [0003] Generally, the commonly used coating technology of liquid diffusion source is spin coating or spray coating process, which mainly adopts the coating metho...

Claims

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Application Information

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IPC IPC(8): B05D1/00B05D1/02H01L21/228C30B31/04
CPCB05D1/005B05D1/02C30B31/04H01L21/228
Inventor 张松刘成法张为国刘超陈寒
Owner SHANGHAI HANS NEW ENERGY TECH
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