Nano channel prism waveguide to enhance biomolecule terahertz characteristic signal in solution and preparation method thereof
A technology of biomolecules and prism waveguides, which is applied in the field of terahertz biomolecular detection, can solve problems such as low dynamic range, and achieve the effect of improving the signal-to-noise ratio and enhancing the characteristic absorption signal.
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[0046] The preparation method of the nanochannel prism waveguide is as follows:
[0047] 1) SiO with a thickness of 800nm is formed on the upper surface of the silicon prism by thermal oxidation 2 layer;
[0048] 2) On SiO 2 Layer etch thickness and SiO 2 The layers are consistent, and the width is 800nm, and the arrayed nanochannels are regularly arranged, and the distance between two adjacent channels is 800nm;
[0049]3) Take the glass sheet, and use wet etching to etch a microchannel perpendicular to the nanochannel at the corresponding position of the glass sheet. The microchannel is 400 μm wide and 50 μm deep;
[0050] 4) Through laser drilling, the inlet and outlet holes are punched at both ends of the micro flow channel of the glass sheet;
[0051] 5) By anodic bonding, the prism silicon mirror with arrayed nanochannels prepared in step 2) is bonded to the glass sheet prepared in step 4), so that the microchannels are connected to each nanochannel and a seal is f...
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