Multifunctional X-ray orientation device and method

Abstract

The invention discloses a multifunctional X-ray orientation device and a method, and belongs to the field of single crystal material processing. The multifunctional X-ray orientation device comprises a working table, a radiation-proof protection cover, an X-ray generating system, a diffracted-ray receiving system, a crystal sample rotating table and a computer control system. A sample containing table in the crystal sample rotating table can be replaced through detachable bolts. The method includes the steps that the multifunctional X-ray orientation device is used to carry out crystal defect identification, different crystal characteristic measurement, manual orientation measurement and angle error obtaining. The multifunctional X-ray orientation device is integrated with an X-ray orientation device measurement system for a plurality of single crystals, the device cost is reduced, and the product homogeneity is guaranteed; detection data of all single crystal materials is fused and finished, the defect types of the single crystal materials are obtained in an intelligent mode, and the utilization efficiency of existing data is improved; a scintillation detector is used as an X-ray detector, the stability degree is high, the anti-interference capability is high, and the defects of a Geiger pipe are recovered.

Description

technical field [0001] The invention belongs to the field of single crystal material processing, and in particular relates to a multifunctional X-ray orientation instrument and a method. Background technique [0002] Using X-ray diffraction technology to carry out non-destructive testing of single crystal materials is a common technical means in the industry. Through the diffraction of X-rays by single crystal wafers, the characteristic curve of the wafer to be tested can be obtained. Based on this characteristic curve, it can be analyzed and obtained. Measure the quality characteristic parameters of the wafer. [0003] At present, the X-ray orientation instruments used for the non-destructive testing of single crystal materials are independent, showing the phenomenon of "one machine and one piece", the automation level of the instrument is not high, and the problem of how to intelligently judge the defect type of single crystal materials needs to be solved urgently; The da...

AI Technical Summary

Problems solved by technology

At present, the receiving signal of X-ray detectors is relatively weak, and there are many clutters. With the improvement of equipment precision requirements, the stability of X-ray detectors needs to be improved urgently.

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