A deposition and doping device for the absorbing layer of a thin-film solar cell

Abstract

The invention discloses a deposition and doping device for the absorbing layer of a thin film solar cell, which includes a deposition chamber, a first supply mechanism, a second supply mechanism and an evaporation heating mechanism. The source material transported in the chamber, the deposition heating element used to heat the source material into the source material vapor is arranged on the deposition chamber, the second supply mechanism transports the dopant material to the evaporation heating mechanism to be heated into the dopant material vapor, and the dopant material vapor The vapor pipe is transported into the deposition chamber, and the vapor pipe is provided with a third switch, and the source material vapor and the dopant material vapor are output from the deposition chamber to be deposited on the substrate. The present invention integrates deposition and doping, can carry out deposition of source materials, and can also carry out diffusion doping. distribution, to ensure that the absorbing layer of thin film solar cells has good and stable performance.

Description

technical field [0001] The invention relates to the technical field of solar cell production, in particular to a deposition and doping device for absorbing layers of thin-film solar cells. Background technique [0002] A solar cell is a device that directly converts light energy into electrical energy through the photoelectric effect or photochemical effect. Thin-film solar cells are a new type of photovoltaic device to alleviate the energy crisis. Thin-film solar cells can be manufactured using cheap ceramics, graphite, metal sheets and other materials as substrates, and the thickness of a thin film that can generate voltage is only a few μm. Thin-film solar cells In addition to being flat, the battery can also be made into a non-planar structure because of its flexibility, which has a wide range of applications. It can be combined with buildings or become a part of buildings, and has a wide range of applications. [0003] Cadmium telluride thin film solar cell, the bandga...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved and the technical task proposed by the present invention are to improve the existing technology, provide a deposition and doping device for the absorbing layer of thin-film solar cells, and solve the difficulty of accurately controlling the doping method of the absorbing layer of thin-film solar cells in the current technology Doping status, prone to lattice defects, affecting the performance of thin-film solar cells

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