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Transient voltage suppressor and manufacturing method thereof

A transient voltage suppression, electrode technology, applied in the direction of electric solid devices, circuits, electrical components, etc., can solve the problem of high manufacturing cost

Active Publication Date: 2018-12-18
车智路数据管理有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The currently commonly used trench TVS can only achieve unidirectional protection. If bidirectional protection is required, multiple TVSs need to be connected in series or in parallel, and the manufacturing cost is relatively high.

Method used

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  • Transient voltage suppressor and manufacturing method thereof
  • Transient voltage suppressor and manufacturing method thereof
  • Transient voltage suppressor and manufacturing method thereof

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Embodiment Construction

[0048]In order to make the objectives, technical solutions and beneficial effects of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0049] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationsh...

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Abstract

The invention provides a transient voltage suppressor and a manufacturing method thereof, the transient voltage suppressor comprising: a substrate of a first conductivity type; a first epitaxial layerof a first conductivity type grown on an upper surface of the substrate; a buried layer of a second conductivity type extending downward from an upper surface of the first epitaxial layer to the first epitaxial layer; a second epitaxial layer of a second conductivity type grown on an upper surface of the first epitaxial layer and the buried layer; extending downward from an upper surface of the second epitaxial layer to a first doped region of a first conductivity type within the second epitaxial layer; a second doped region of the second conductivity type and a third doped region of the second conductivity type; a dielectric layer located on an upper surface of the second epitaxial layer; a first electrode electrically connected to the second epitaxial layer; and a second electrode electrically connected to the lower surface of the substrate. The transient voltage suppressor has the characteristics of low capacitance, high integration level and simple manufacturing process.

Description

technical field [0001] The invention relates to a transient voltage suppressor and a manufacturing method thereof, belonging to the field of semiconductor devices. Background technique [0002] Transient voltage suppressor (TVS) is a high-efficiency protection device based on diodes, which is used to protect other devices in the circuit from various forms of transient high voltage impact. It has a small clamping coefficient and a small volume. Small size, fast response, small leakage current and high reliability are widely used in the protection of electronic devices in communication systems, computers, portable devices and control systems. The capacitance of traditional TVS products is usually dozens or even hundreds of pF, which has a great attenuation effect on high-frequency signals and cannot meet today's information transmission needs. However, low-capacitance TVS can reduce the interference of parasitic capacitance on the circuit and reduce the frequency of high-frequ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/02
CPCH01L27/0255
Inventor 不公告发明人
Owner 车智路数据管理有限公司
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