Dual-channel feedback rigid-flexible coupling platform control method

A rigid-flexible coupling, platform control technology, applied in general control systems, adaptive control, control/regulation systems, etc., can solve problems such as reducing system bandwidth, ineffective control signals, aggravating vibration, etc., to achieve high-speed precision motion , Reduce the control complexity, without switching the effect of the control

Active Publication Date: 2021-07-09
FOSHAN HUADAO SUPER PRECISION TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the introduction of flexible hinges, the bandwidth of the system will be reduced and low-frequency vibrations will be caused. Using traditional PID control, after being amplified by the controller, the control signal will produce greater fluctuations, which will further aggravate the vibration and affect the control accuracy. If the control signal is directly controlled The filtering process will filter out the information of the motion planning command while filtering out the disturbance of the flexible hinge, so the control signal will not work at all.
Moreover, due to the inconsistent control laws in the process of large-scale motion and micro-motion compensation, it is necessary to switch models for control, which makes the control process very complicated

Method used

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  • Dual-channel feedback rigid-flexible coupling platform control method
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  • Dual-channel feedback rigid-flexible coupling platform control method

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Experimental program
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Effect test

Embodiment 1

[0052] In this embodiment, the dual-channel feedback rigid-flexible coupling platform control method is dual grating scales measuring single-drive motion control; wherein the grating scales are used to measure the displacement of the frame and the working platform respectively; the speed information is obtained by processing the displacement of the grating scales. In this scheme, the superscript dot on the parameter indicates the derivative, and the number of dots is the order of the derivative; the superscript ^ on the parameter indicates the estimated value.

[0053] Such as figure 1 As shown, in the embodiment of the present invention, the rigid-flexible coupling platform mainly includes a mechanical guide rail, a frame rigid body, a flexible hinge, and a working platform. Set x M , x m are the displacements of the frame rigid body and the working platform, respectively, are the speeds of the rigid body of the frame and the working platform, M and m are the inertias of t...

Embodiment 2

[0085] In this embodiment, the dual-channel feedback rigid-flexible coupling platform control method is a grating ruler plus a capacitive sensor to measure the single-drive motion control; wherein the capacitive sensor is used to measure the relative displacement between the frame and the platform; compared with the embodiment 1, the embodiment 1 passes The relative displacement between the frame and the working platform is obtained after the difference of the measured distances of the two grating rulers, while the relative displacement is directly measured in Embodiment 2.

[0086] Such as figure 2 As shown, in the embodiment of the present invention, the rigid-flexible coupling platform mainly includes a mechanical guide rail, a frame rigid body, a flexible hinge, and a working platform. Set x m is the displacement of the working platform, is the speed of the working platform, x is the relative displacement between the working platform and the frame rigid body, is the r...

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Abstract

The invention discloses a dual-channel feedback rigid-flexible coupling platform control method. In order to solve the interference caused by the low-frequency vibration of the flexible hinge to the control signal, the control signal is separated into three types of control: feedforward, flexible hinge disturbance force and speed displacement deviation correction. quantity. When the motion planning is reasonable, the equivalent dynamic model of the rigid-flexible coupling platform is an ideal rigid body without friction, and the control force is mainly the force of feedforward and flexible hinge. The velocity displacement deviation is mainly caused by the elastic deformation of the flexible hinge, and the main frequency component is the natural frequency of the flexible hinge, which can be filtered out by notch filtering. Since the ESO itself has a filtering function, there is no resonance component after superimposing the above three control signals. The dynamic response equation of the platform is equivalently transformed into an ideal undisturbed form. This not only avoids the cumbersome and complicated model switching control, but also realizes high-speed and precise motion.

Description

technical field [0001] The invention relates to the field of high-speed precision motion control, in particular to a dual-channel feedback rigid-flexible coupling platform control method. Background technique [0002] In the field of high-speed precision motion control, there is a friction dead zone in the motion platform based on mechanical guide rails, so the control accuracy can only reach the micron level. In the case of higher precision control, it is necessary to use air suspension, magnetic suspension or static pressure guide rail to reduce or even eliminate the friction effect. A wide range of electronic manufacturing technology fields. [0003] Rigid-flexible coupling platform cleverly combines the characteristics of large-scale rigidity motion of linear platform and friction-free precision motion of flexible hinge. At the zero-crossing point of speed, the elastic deformation of flexible hinge is used to avoid friction dead zone and realize the compensation of fric...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B13/04
CPCG05B13/042
Inventor 彭皓杨志军白有盾孙晗
Owner FOSHAN HUADAO SUPER PRECISION TECH CO LTD
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