A Control Method of Rigid-Flexible Coupling Motion Platform Based on Disturbance Force Measurement and Compensation

Abstract

The invention discloses a rigid-flexible coupling motion platform control method based on disturbance force measurement and compensation. Firstly, the speed and displacement of the rigid body of the platform are used as feedback, and the driving unit of the rigid body of the platform is an actuator. A closed-loop control system of the rigid body of the platform is established, and then the frame is detected. The velocity and displacement of the rigid body are respectively compared with the velocity and displacement of the rigid body of the platform to obtain the velocity difference and displacement difference between the two, and then the obtained velocity difference and displacement difference are multiplied by the damping and stiffness of the flexible hinge respectively to obtain the The disturbance force of the flexible hinge on the rigid body of the platform is finally converted into an equivalent control quantity by dividing the obtained disturbance force by the transfer function from the control quantity to the driving force, and then multiplied by a proportional gain to compensate the control quantity of the rigid body of the platform, which is transformed into Disturbance-free rigid-body platform control system. Compared with the prior art, the technical solution of the present invention does not need switching control and reduces control complexity, and finally realizes high-speed precision motion.

Description

technical field [0001] The invention relates to the technical field of high-speed precision motion control, in particular to a rigid-flexible coupling motion platform control method based on disturbance force measurement and compensation. Background technique [0002] In the field of high-speed precision motion control, there is a friction dead zone in the motion platform based on mechanical guide rails, so the control accuracy can only reach the micron level. In the case of higher precision control, it is necessary to use air suspension, magnetic suspension or static pressure guide rail to reduce or even eliminate the friction effect. A wide range of electronic manufacturing technology fields. [0003] Moore's law exists in the electronics manufacturing industry, that is, when the price does not change, the number of components that can be accommodated on an integrated circuit will double every 18 to 24 months, and the performance will also double. The accuracy and speed ...

AI Technical Summary

Problems solved by technology

Traditional friction compensation schemes and control methods are difficult to meet the growing demand for high-speed precision motion control

In order to solve the above problems, scientists in this field have been working hard to find a control scheme that can overcome frictional disturbances. Among them, the linear active disturbance rejection control algorithm (LADRC) is an effective method to overcome disturbances. Unified consideration, this can suppress the disturbance to a certain extent, but some scientific researchers have found that LADRC is not suitable for high bandwidth requirements and strong nonlinearity caused by friction (dead zone etc.)

At the same time, the previous technology uses a frictionless flexible hinge combined with a mechanical guide rail platform to realize the compensation of the friction dead zone. However, due to the inconsistency between the high-speed motion and the control law of the compensation process, model switching control is required, but the model switching control makes the whole The control process becomes complex and cumbersome

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