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Method for polishing metal mirror by using diamond single-point vehicle auxiliary ion beam
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A technology of polishing metal and ion beam, which is applied in the field of optical processing, can solve the problem that the processing accuracy is difficult to meet the requirements of high-quality optical systems
Active Publication Date: 2019-09-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0006] The purpose of the present invention is to solve the problem that the processing accuracy in the existing metal mirror processing is difficult to meet the requirements of high-quality optical systems, and to provide a method for diamond single-point car-assisted ion beam polishing of metal mirrors
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[0038] 1) Single-point lathe processing until the mirror surface error rms value is 28.2nm, PV value is 850nm, surface roughness Ra1.95nm, and the thickness h of the damaged layer on the lower surface that needs to be produced is greater than 850nm;
[0039] 2) Adjust the working parameters of diamond single-point turning, and the processing parameters of single-point turning are as follows:
[0043] 3) Single-point car removes material uniformly on the mirror surface, the material removal thickness is 5 μm, and the thickness h of the damaged layer on the lower surface is 920nm, satisfying h≥PV;
[0044] 4) Detect the mirror surface error RMS value of 29.1nm to prepare for the next step of ion beam processing;
[0045] 5) Set the working parameters of ion beam p...
Embodiment 2
[0049] Using this method to process a 132mm diameter aluminum alloy convex reflector
[0050] 1) Single-point lathe processing until the mirror surface error rms value is 29.6nm, PV value is 1040nm, surface roughness Ra2.01nm, and the thickness h of the damaged layer on the lower surface that needs to be produced is greater than 1040nm;
[0051] 2) Adjust the working parameters of diamond single-point turning, and the processing parameters of single-point turning are as follows:
[0055] 3) Single-point car removes material evenly on the mirror surface, the material removal thickness is 6 μm, and the thickness h of the damaged layer on the lower surface is 1100nm, satisfying h≥PV;
[0056] 4) Detect the mirror surface error RMS value of 30.5nm, to prepare for the next step of ion beam processing;
[0057] 5) Set the working parameters of ion beam polishing: the ion energy is 800ev, the gas i...
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Abstract
The invention provides a method for polishing a metal mirror by using a diamond single-point vehicle auxiliary ion beam, and belongs to the technical field of optical processing. According to the method, a layer of uniform lower surface destruction layer with a certain thickness is formed on the surface of a metal mirror by using a diamond single-point vehicle, the mirror surface is polished by utilizing the ion beam, due to the fact that the material removal characteristic of the mirror surface with the specific lower surface destruction layer in the ion beam polishingprocess changes, the material removal rate of the ion beampolishing is improved, and meanwhile, the surface roughness of the metal mirror is not changed. The damage layer on the lower surface of the metal mirror changes the material removal characteristic of the metal material in the ion beamprocessing process, not only is the material easier to remove, but also the surface roughness of the metal mirror is kept unchanged.
Description
technical field [0001] The invention belongs to the technical field of optical processing, and in particular relates to a method for diamond single-point car-assisted ion beam polishing of metal mirrors. Background technique [0002] Metal mirrors are widely used in modern optical systems due to their excellent physical properties and economic efficiency, but there are still some deficiencies in the high-precision processing technology of metal mirrors. The main technical difficulties of precision machining of metal mirrors are: high deterministic processing of mirror surface shape accuracy; improvement of mirror surface roughness; avoiding environmental pollution during processing. [0003] Taking aluminum, the most commonly used metal mirror material, as an example, the main technical method for processing aluminum mirrors at present is to use diamond single-point turning. The roughness is about Ra 1.5nm. A high-quality optical system often requires the rms value of the ...
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IPC IPC(8): B23P15/00
CPCB23P15/00
Inventor 唐瓦邓伟杰尹小林罗霄薛栋林张学军
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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