A microlens array capable of receiving and transmitting ultrasound
A microlens array and microlens technology, applied in the analysis of solids using sound waves/ultrasonic waves/infrasonic waves, material analysis using sound waves/ultrasonic waves/infrasonic waves, instruments, etc., can solve the inconvenient miniaturization and difficult optical and acoustic integration of the same scale Integration, complex optical or acoustic structures, etc., to eliminate multiple reflection attenuation, improve coupling efficiency and detection sensitivity, reduce complexity and laser attenuation
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[0022] Embodiment: a microlens array capable of receiving and transmitting ultrasound, characterized in that it includes a base plate 1 made of piezoelectric materials with high optical transmittance, an electrode layer 2 with high optical transmittance, and a high optical transmittance. The optical mask layer 3 with reflectivity, and the acoustic matching layer 6 with high optical transmittance.
[0023] Further, the base base plate 1 selects a PMNT single crystal material with high optical transmittance; the base base base plate 1 is engraved with a 10mm×10mm array composed of microlenses 4 with a diameter of 250 μm and a radius of curvature of 835 μm, and a single microlens 4 The effective focal length of the microlens 4 is less than 1.8mm; the array of the microlenses 4 adopts a 40×40 square arrangement; the microlens 4 adopts a two-dimensional spherical square structure, and the center distance between the microlenses 4 is 250 μm; the The surface of the electrode layer 2 ...
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