Micro-lens array capable of receiving and transmitting ultrasound
A microlens array and microlens technology, which is applied in the analysis of solids using sound waves/ultrasonic waves/infrasonic waves, the use of sound waves/ultrasonic waves/infrasonic waves for material analysis, instruments, etc., can solve the inconvenience of miniaturization, complex optical or acoustic structures, and difficult to The integration of optics and acoustics at the scale can achieve the effects of eliminating multiple reflection attenuation, reducing complexity and laser attenuation, and improving coupling efficiency and detection sensitivity
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[0022] Embodiment: A kind of microlens array that can receive and emit ultrasound, it is characterized in that, comprises the base substrate 1 that adopts the piezoelectric material of high optical transmittance to make, has the electrode layer 2 with high optical transmittance, has high optical transmittance An optical mask layer 3 with reflectivity, and an acoustic matching layer 6 with high optical transmittance.
[0023] Further, the base base plate 1 selects a PMNT single crystal material with high optical transmittance; the base base plate 1 is engraved with a 10mm×10mm array composed of microlenses 4 with a diameter of 250 μm and a radius of curvature of 835 μm, and a single microlens 4 The effective focal length of the microlens 4 is less than 1.8mm; the array of the microlens 4 adopts a 40×40 square arrangement; the microlens 4 adopts a two-dimensional spherical square structure, and the center distance between each microlens 4 is 250 μm; The surface of the electrode ...
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