High-performance piezoelectric accelerometer with ring beam structure

Abstract

The invention provides a high-performance piezoelectric accelerometer with a ring beam structure. The high-performance piezoelectric accelerometer comprises the ring beam structure, piezoelectric elements, an upper outer shell and a lower outer shell, wherein the ring beam structure comprises an annular beam, a plurality of elastic beam arms and a central base plate which are integrally arranged;the central base plate is arranged in the center of the annular beam; the plurality of elastic beam arms are uniformly arranged in the annular beam; the central base plate is a regular N-polygon baseplate; each side surface of the central base plate is matched with one elastic beam arm; the other end of each elastic beam is fixedly connected with the inner wall of the annular beam, the upper surface and the lower surface of the center base plate are matched with central mass blocks in the same shape respectively, piezoelectric elements are arranged on the upper surface and the lower surface of each elastic beam arm, a cavity for accommodating the ring beam structure is defined by the upper outer shell and the lower outer shell, and the upper outer shell and the lower outer shell clamp theannular beam. By utilizing the bending mode of the beam, the high-performance piezoelectric accelerometer enhances the sensitivity, increases the bandwidth without losing performance due to the highsymmetry, and further improves the torsion resistance and the anti-jamming capability.

Description

technical field

[0001] The invention belongs to the field of vibration sensors, in particular to a high-performance piezoelectric accelerometer with a ring beam structure. Background technique

[0002] Accelerometers are a class of inertial sensors based on a mass-spring-damper system. When the system vibrates, the mass exerts a load on the spring, so by measuring the deformation of the elastic body, acceleration information can be obtained. Accelerometers are divided into piezoelectric, piezoresistive, or capacitive types according to sensitive elements, among which piezoelectric accelerometers are the most widely used. The piezoelectric accelerometer uses the piezoelectric effect of the active material to combine the piezoelectric element with the elastic body. When the inertial mass is subjected to mechanical force, the force applied to the piezoelectric element will also change through the deformation of the elastic body, so that Electric charge is generated on its sur...

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