The invention provides a multi-dimensional vibration platform with oppositely-arranged double-sandwich
piezoelectric actuators and an excitation method of the multi-dimensional vibration platform, and belongs to the technical field of high-frequency vibration
engineering and micro-
nano machining.The vibration platform comprises a center platform, the two oppositely-arranged
piezoelectric actuators, two end covers and two bolts, wherein the center platform is integrated with the
tail end platform, the two flexible hinges and the two amplitude-change poles, and the center platform is slender and is in mirror symmetry about the longitudinal symmetry plane of the
tail end platform. The piezoelectric
actuator comprises a
longitudinal vibration ceramic group, a
bending vibration ceramic group around the Y axis and a
bending vibration ceramic group around the Z axis, translation along the X / Y / Z axis and rotation around the Y / Z axis can be realized through in-phase or anti-phase excitation different combinations under the condition of not increasing extra driving channels, and five-degree-of-freedom high-frequency micro-vibration output can be achieved at most. The structure has high symmetry, low parasitic vibration, compact size and high integration, and is suitable for precise
engineering scenes such as micro-nano
processing,
laser-assisted manufacturing,
cell manipulation and active vibration suppression.