Surface acoustic wave device

A surface acoustic wave and surface orientation technology, applied in impedance networks, electrical components, etc., can solve problems such as hindering mass production, the substrate is limited to quartz, and no single crystal aluminum electrode film is proposed.

Inactive Publication Date: 2003-05-21
快速追踪有限公司
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  • Application Information

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Problems solved by technology

[0024] However, the single crystal film formation process disclosed so far has disadvantages that the equipment is expensive, the film growth rate is so slow as to prevent mass production, and the substrate used is limited to quartz.
In the case of approximately 36-degree rotated Y-cut lithium tantalate piezoelectric substrates that are best constructed for RF band filters, where power durability of the electrode film is an issue, no method has been proposed for easy formation of single-crystal aluminum electrode films. means

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Embodiment Construction

[0040] The present inventors conducted empirical studies in an attempt to form a single crystal aluminum film on a 36-degree-rotated Y-cut lithium tantalate substrate similar to that commonly used as a piezoelectric substrate for an RF band filter. As a result, the present inventors have found that increasing the cutting orientation for crystal cutting from the 36-degree rotation Y commonly used in the prior art to the larger angle side, i.e., 38-44 degree rotation Y, forms a titanium film On the substrate, and when an aluminum film is formed on the titanium film, the aluminum film becomes a single crystal film. In a SAW device using the thus formed aluminum single crystal film as an electrode film, the power durability of the electrode film is drastically improved.

[0041] The SAW device of the present invention includes a substrate having a surface and at least one pair of interdigital electrodes (or comb electrodes) formed on the surface of the substrate. The interdigitat...

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Abstract

A surface acoustic wave device having an electrode film which contains aluminum single crystal film excellent in power resistance and is formed on a lithium tantalate substrate having a cut corner in the vicinity of 36 degree rotation Y cut, and having an inter-digital electrode on the substrate, the substrate being composed of 38 to 44 degree rotation Y cut lithium tantalate single crystal, the inter-digital electrode containing a titanium film and an aluminum film formed on the titanium film, the aluminum film consisting of a single crystal film in which only spots appear in selected-area electron beam diffraction.

Description

technical field [0001] The present invention relates to a surface surface acoustic wave device, and more particularly, to a surface acoustic wave device with an electrode film having improved power durability. Background technique [0002] Surface acoustic wave (SAW) devices, generally SAW filters and SAW resonators, are commonly used as RF filters instead of dielectric filters in mobile communication devices such as mobile phones and cordless phones. The reason is that a SAW device, especially a SAW filter, has a smaller size than a dielectric filter, and when comparing devices of the same size, the former has better electrical characteristics. [0003] The SAW device includes at least a piezoelectric substrate, a comb-shaped electrode pattern in the form of a metal film formed on the surface of the piezoelectric substrate, and a housing for accommodating the piezoelectric substrate and the electrode pattern. As the piezoelectric substrate, lithium niobate, lithium tantala...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H3/08H03H9/02H03H9/145
CPCH03H9/02559H03H9/02543H03H3/08H03H9/145
Inventor 木村悟利中野正洋佐藤胜男
Owner 快速追踪有限公司
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