A two-degree-of-freedom folding and unfolding three-dimensional micromanipulator with a three-stage amplifying mechanism

Abstract

The invention discloses a two-degree-of-freedom folding and unfolding three-dimensional micro-manipulator with a three-stage amplifying mechanism, which is composed of two sets of identical three-stage amplifying mechanisms folded along a symmetrical axis; the three-stage amplifying mechanism includes a lever displacement amplifying mechanism I, a half-bridge displacement Amplifying mechanism, lever displacement amplifying mechanism II, parallelogram guiding mechanism and base body; the base body is located at the bottom, lever displacement amplifying mechanism II and half-bridge type displacement amplifying mechanism are vertically arranged above the base body in turn from outside to inside, and the half-bridge type displacement amplifying mechanism The top end is connected with the lever displacement amplifying mechanism I, and the parallelogram guiding mechanism is integrated in the lever displacement amplifying mechanism II; a piezoelectric ceramic driver is arranged between the base body and the lever mechanism I, and the lever mechanism II is provided with an output end and an input end; half The output end of the bridge amplifying mechanism is connected with the input end of the lever displacement amplifying mechanism II through the connecting rod and the flexible hinge; the output end of the lever displacement amplifying mechanism II is connected with the clamping jaw.

Description

technical field [0001] The invention belongs to the field of micro-manipulation robots, in particular to a two-degree-of-freedom folding and unfolding three-dimensional micro-manipulator with a three-stage amplifying mechanism. Background technique [0002] In recent years, with the rapid development of microelectronics, life sciences and micromanipulation robotics, the application of micro-nano devices has become more and more extensive. Micro-nano device manufacturing, testing and processing, and precision operations are increasingly integrated with other basic disciplines. It has become one of the important frontier science and technologies leading scientific development and engineering applications, and has received extensive attention from many experts and scholars. Micromanipulation technology has been widely used in many fields such as bioengineering, microdevice bonding, optical device assembly and optical fiber docking. [0003] As the end effector of the micro-ope...

AI Technical Summary

Problems solved by technology

When the planar structure micro-manipulator is combined with the micro-manipulator robot arm, it needs to use the base and other devices. The clamping direction is generally perpendicular to the axis of the manipulator arm, which limits the application range of the micro-manipulator robot and increases the difficulty of manipulator motion control.

In addition, in the field of complex micro-manipulation, single-degree-of-freedom micro-manipulators are no longer suitable

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