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Environmental data monitoring method and monitoring system

An environmental data and monitoring system technology, applied in the fields of electrical digital data processing, digital data information retrieval, special data processing applications, etc., can solve the problems of missing concentration data, inaccurate monitoring results of air molecular pollutants, etc., and achieve the resolution of monitoring results. inaccurate effect

Pending Publication Date: 2022-04-22
CHANGXIN MEMORY TECH INC
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Problems solved by technology

[0005] This application provides an environmental data monitoring method and monitoring system to solve the problem that the existing technology is easy to lose concentration data in the process of data transmission when monitoring air molecular pollutants in a clean room, thereby causing air pollution in the clean room. The problem of inaccurate monitoring results of molecular pollutants

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  • Environmental data monitoring method and monitoring system
  • Environmental data monitoring method and monitoring system
  • Environmental data monitoring method and monitoring system

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Embodiment Construction

[0056] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with this disclosure. Rather, they are merely examples of apparatuses and methods consistent with aspects of the present disclosure as recited in the appended claims.

[0057] Semiconductor products such as integrated circuits, microwave devices and optoelectronic devices are widely used in daily life. With the increasing complexity of the manufacturing process of semiconductor products and the continuous shrinking of the feature size of semiconductor products, the impact of air pollutants on semiconductor products has become a problem that needs attention i...

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Abstract

The invention provides an environmental data monitoring method and monitoring system. The method comprises the steps that a second server receives first environment data sent by a first server; the second server determines that data loss exists in the first environment data; the second server obtains lost data in the first environment data from the first server; the second server obtains second environment data according to the first environment data and the loss data, and when the concentration of the sampling gas in the second environment data exceeds a preset concentration threshold, the second server sends alarm information to the terminal equipment. According to the method, the problem that the monitoring result of the air molecule pollutants in the clean room is inaccurate can be solved.

Description

technical field [0001] The present application relates to semiconductor manufacturing environment monitoring technology, in particular to an environmental data monitoring method and monitoring system. Background technique [0002] With the increasing complexity of the manufacturing process of semiconductor products and the continuous shrinking of the feature size of semiconductor products, the impact of air pollutants on products has become a key issue that needs to be paid attention to in the manufacturing process of semiconductor products. For example, the ammonia gas and acid gas generated in the ambient air will affect the formation of metal wires, and the reaction of ammonia gas and acid gas will generate salts and affect the yield of semiconductor products. Therefore, it is necessary to perform the preparation of semiconductor products in a clean room and monitor the air molecular contamination in the clean room environment. [0003] When the existing technology monit...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F16/215G06F16/245G06F16/2458G01N33/00
CPCG06F16/2471G06F16/245G06F16/215G01N33/0065G01N33/0063G01N33/007G08B21/12H01L22/26G01N33/0006
Inventor 丁云霄刘晓辉
Owner CHANGXIN MEMORY TECH INC
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