Soup concentration controller of semiconductor processing appts.

A technology of processing device and control device, which is applied in semiconductor/solid-state device manufacturing, semiconductor/solid-state device testing/measurement, electrical components, etc., and can solve the problems of reduced semiconductor qualification rate, inability to control concentration with high precision, concentration deviation, etc.
CN1540725AInactive Publication Date: 2004-10-27KAIJOO KK
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
KAIJOO KK
Publication Date
2004-10-27
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The control device keeps concentration of liquor invariable and surface of liquor at height needed. The device provides following measuring functions: function of measuring concentration of liquor; function of observing drifting quantity of concentration, after a period of waiting time of concentration feed back control system; function of calculating quantity of supplement of liquor; function of forecasting concentration; function of handling quantity of supplement of liquor; and function of controlling quantity of supplement of liquor. Based on the said functions above, quantity of supplement of liquor is supplied according to preset standard quantity of supplement.
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Description

[technical field]

[0001] The present invention relates to a semiconductor processing device chemical solution concentration control device for maintaining a chemical liquid level required for semiconductor processing while keeping the processing chemical liquid concentration constant in a semiconductor processing device. [Background technique]

[0002] In semiconductor processing equipment such as a wet bench (γ‚¦γ‚¨γƒ„γƒˆγ‚Ήγƒ†-シヨン) and the like, the concentration of the chemical solution changes and the amount of the chemical solution decreases due to the removal of the wafer from the processing tank and the evaporation of the chemical solution. Therefore, the liquid medicine should be replenished regularly to maintain the concentration and volume of the liquid medicine.

[0003] Figure 5 It is a block diagram showing the chemical concentration control of conventional semiconductor processing equipment. Such as Figure 5 As shown, in order to maintain the concentration of the liquid...

Claims

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