Interference system for simultaneously measuring Faraday effect based displacement and angle

A Faraday rotation and interference system technology, applied in the field of metering devices, can solve the problems of cumbersome detection process, inability to meet multi-degree-of-freedom dynamic real-time measurement, lengthy and other problems, and achieve convenient installation, large displacement and angle measurement range, and simple optical path structure Effect

Inactive Publication Date: 2007-02-28
ZHEJIANG SCI-TECH UNIV
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Problems solved by technology

However, the characteristics of single-parameter measurement of this method determine that it can only perform multi-degree-of-freedom time-sharing measurement, and cannot meet the requirements of multi-degree-of-freedom dynamic

Method used

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  • Interference system for simultaneously measuring Faraday effect based displacement and angle
  • Interference system for simultaneously measuring Faraday effect based displacement and angle
  • Interference system for simultaneously measuring Faraday effect based displacement and angle

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Example Embodiment

[0018] As shown in Figure 1, the orthogonal linearly polarized light emitted by the dual-frequency laser 1 is divided into a reference beam and a measurement beam by the first beam splitter 2. The reference beam is beaten by the first analyzer 3 and then connected to the first detector. 4; The measuring beam is again divided into the transmitted beam and the reflected beam by the second beam splitter 5. The transmitted beam returns to the original path of the incident light based on the Faraday rotation effect, and then enters the measuring plane mirror 17 placed on the measured object, and reflects The light beam is reflected by the plane mirror 6 and enters another incident light return device of the same structure based on the Faraday rotation effect. After exiting, it is incident on the same measuring plane mirror 17 placed on the object to be measured; both the incident and the exit are based on the Faraday rotation effect. The two beams in the original return device of the i...

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Abstract

The invention relates to an interference system based on Faraday rotation effect to measure displacement and angle at same time, wherein the crossed line polarized light of dual-frequency laser via first splitter is divided into reference and measuring beams; the reference beam via the first polarization device beat frequency to connect the first detector; the measuring beam via second splitter is divided into transmission and reflective beams; the transmission beam via one incident light feedback device based on beat Faraday rotation effect emits into the measuring mirror at the measured object; the reflective beam reflected by plane mirror emits to another incident light feedback device based on Faraday rotation effect; they will exit and emit to the same measuring mirror on the measured object; two beams emitting and exiting two incident light feedback devices based on Faraday rotation effect are parallel. The invention can realize high-accuracy large-scale displacement and angle measurements at them same, to be used in nanometer, micro photomechanical techbnique and integrated circuit chip.

Description

technical field [0001] The invention relates to a measuring device characterized by adopting an optical method, in particular to an interference system for simultaneous measurement of displacement and angle based on the Faraday rotation optical effect. Background technique [0002] High precision, wide range, and multiple degrees of freedom are always the goals pursued in the field of metrology. With the development of modern science and technology, the multi-degree-of-freedom measurement of space objects is increasingly showing urgency and importance. Fields such as coupling and multi-degree-of-freedom platforms play a very important role. Common multi-degree-of-freedom measurement methods include three-coordinate measuring machine, stereo vision six-degree-of-freedom measurement, six-degree-of-freedom measurement based on holographic lens, laser tracking measurement technology, multi-degree-of-freedom measurement based on interference technology, etc. Although these measu...

Claims

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Application Information

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IPC IPC(8): G02F1/09G01B9/02G01D5/26
Inventor 陈本永杨涛钟挺孙政荣张丽琼
Owner ZHEJIANG SCI-TECH UNIV
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