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Screw vacuum pump

a vacuum pump and screw technology, applied in the direction of machines/engines, mechanical equipment, liquid fuel engines, etc., can solve the problems of inability to reduce power consumption or place the pump near, inefficient use of high pumping speed, etc., to reduce the size of the pump, reduce the influence of drive heat, and high flexibility of the design of the pump components

Inactive Publication Date: 2013-03-07
TOHOKU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention involves placing the drive motor / motors in a way that reduces the size of the pump in the front and makes it easier to design pump components that are more flexible. This is achieved by making the most of the heat generated by the motors and keeping it inside the rotor so it doesn't affect other parts of the pump.

Problems solved by technology

In a semiconductor device manufacturing apparatus, a liquid crystal panel manufacturing apparatus, or a solar panel manufacturing apparatus, a serious problem arises in a device manufacturing process if oil backflow occurs from a pump into a process chamber of the device manufacturing apparatus.
On the other hand, since the pumping speed is lowered depending on the kind of gas to be exhausted, a pump having a high pumping speed is inefficiently used and therefore a problem exists that it is not possible to reduce the power consumption or to place the pump near the apparatus due to the pump size being large.
Further, with respect to general dry pumps and mechanical booster pumps, a serious problem exists that product is deposited inside the pump between an inlet port and an outlet port, resulting in a short maintenance time.

Method used

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Examples

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first embodiment

[0026]First, as shown in FIGS. 1 and 2, a screw vacuum pump 100 according to a first embodiment of this invention comprises a pair of a male rotor 110 and a female rotor 120 that are disposed in engagement with each other while maintaining an engagement gap therebetween and are rotated synchronously in opposite directions (driven synchronously by a non-illustrated inverter), a stator 130 receiving therein the male rotor 110 and the female rotor 120, drive motors 140A and 140B for rotating the male rotor 110 and the female rotor 120, rotation shafts (rotation axes) 150A and 150B fixed to the male rotor 110 and the female rotor 120, bearings 160Aa, 160Ab, 160Ac, 160Ba, 160Bb, and 160Bc for the rotation shafts 150A and 150B, a pair of gears 170A and 170B (which prevent contact between the male and female screw rotors in abnormality and, in particular, which significantly reduce vibration and noise due to backlash of gears at the time of starting and stopping rotation of the rotors) att...

second embodiment

[0058]Next, a screw vacuum pump 200 according to a second embodiment of this invention will be described with reference to FIG. 6.

[0059]Herein, the structures, other than a drive motor 240, of the screw vacuum pump 200 according to the second embodiment are totally the same as those described above. Therefore, by reading 100s symbols shown in the description relating to the screw vacuum pump 100 of the first embodiment and shown in FIGS. 1 to 5 as 200s symbols, explanation of the structures other than the drive motor 240 is omitted.

[0060]As shown in FIG. 6, in the screw vacuum pump 200 according to the second embodiment of this invention, the single drive motor 240 as a drive source common to a male rotor 210 and a female rotor 220 is received in a rotor hollow portion 212 formed in the male rotor 210.

[0061]The drive motor 240 rotates a rotation shaft 250A and a drive force of the drive motor 240 is synchronously transmitted also to a rotation shaft 250B through synchronous gears 27...

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Abstract

A screw vacuum pump includes a male rotor, a female rotor, a stator, and a drive motor / motors. A screw gear portion of the male rotor, a screw gear portion of the female rotor, and the stator cooperatively form a gas working chamber. The stator has an inlet port and an outlet port. At least one of the male rotor and the female rotor has a rotor hollow portion which is opened on at least one end face side in a rotation-axis longitudinal direction of the male rotor and / or the female rotor. The drive motor is at least partially received in the rotor hollow portion.

Description

TECHNICAL FIELD[0001]This invention relates to a screw vacuum pump.BACKGROUND ART[0002]In a semiconductor device manufacturing apparatus, a liquid crystal panel manufacturing apparatus, or a solar panel manufacturing apparatus, a serious problem arises in a device manufacturing process if oil backflow occurs from a pump into a process chamber of the device manufacturing apparatus. Accordingly, use is generally made of, what is called, a dry pump, a mechanical booster pump, or a turbomolecular pump in which there is no occurrence of contact between suction gas and oil.[0003]However, since molecular weights of process gas, carrier gas, generated gas, and so on are broad, i.e. from 1 to one hundred and several tens, the current situation is that the above-mentioned pumps are selectively used depending on their pumping characteristics for those various gases and their inherent pumping regions.[0004]On the other hand, since the pumping speed is lowered depending on the kind of gas to be ...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): F01C1/16
CPCF04C18/084F04C18/16F04C2220/12F04C25/02F04C2240/402F04C23/008
Inventor OHMIAKUTSU, ISAO
Owner TOHOKU UNIV
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