Method for producing ferroelectric thin film

a technology of ferroelectric thin film and production method, which is applied in the direction of instruments, record information storage, transportation and packaging, etc., can solve the problems of limited applicability of the above-described method of patent reference 2, complicated processes, and deterioration of properties, and achieve the effect of suppressing anomalous grain growth

Inactive Publication Date: 2015-07-02
MITSUBISHI MATERIALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This approach enables the production of ferroelectric thin films with stable preferred (100) plane orientation and fine-grained crystal texture, allowing for arbitrary thickness adjustment and improved insulation properties.

Problems solved by technology

However, the method described in the above-described Patent Reference 1 requires complicated processes including introduction of the seed layer and the buffer layer.
In addition, the presence of such a seed layer and a buffer layer may cause deterioration of properties of the ferroelectric thin film and may cause contamination or the like.
However, applicability of the above-described method of Patent Reference 2 is limited or performance of the film is insufficient in a practical application since the achieved preferred orientation includes plural orientations, for example, (111) plane and (100) plane, or (100) plane and (200) plane.
When the Pb-containing perovskite type ferroelectric film has thin thickness, there is a case that crystal nuclei cannot be generated in sufficient density, resulting in anomalous growth of large crystals, and making it difficult to control the grain diameters of crystals.
The ferroelectric film with such anomalously grown crystals is sometimes inferior in insulation property, thereby including problems in its quality.

Method used

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  • Method for producing ferroelectric thin film
  • Method for producing ferroelectric thin film
  • Method for producing ferroelectric thin film

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0088]A substrate having a Pt base electrode was prepared by forming the Pt base layer on a silicon substrate by sputtering method. Composition for orientation controlling layer which had been prepared as described-above was coated on the Pt base electrode by spin coating method, where the spin coating was performed firstly with a rotation rate of 500 rpm for 3 seconds, and subsequently with a rotation rate of 3500 rpm for 15 seconds. Next, the coated composition was dried and preliminarily fired by heating the substrate using a hot-plate at 300° C. for 5 minutes in the air atmosphere. After performing the coating and calcination of the composition for one time the coated composition was subjected to firing (main firing) by heating the substrate to 700° C. with heating rate of 10° C. / second and annealing the substrate at 700° C. for 1 minute in oxygen atmosphere. By this process, the coated composition was crystallized, and a orientation controlling layer of 35 nm in thickness was o...

examples 2 , 3 , 6 and 7

Examples 2, 3, 6 and 7

[0089]In Examples 2, 3, 6, and 7, a ferroelectric thin film was formed on Pt base electrode of each substrate under conditions shown in Table 1, and the ferroelectric thin film was obtained as an orientation controlling layer having a thickness shown in Table 3.

TABLE 1ExampleNumber1234567891011OrientationConcentration (mass %)101212101251212121212controlling layerFrequency of coating11121311111Rotation rate (rpm)35002000300030002000200020002000200020002000Time of rotation (second)1520151515152020202020Calcination temperature (° C.)300150175175175175200200200315175Time of calcination (minute)55555555555Frequency of firing11111111111ThicknessConcentration (mass %)10105121010adjusting layerFrequency of coating661466Rotation rate (rpm)300020002000200030003000Time of rotation (second)151520201515Calcination temperature (° C.)175175300300300300Time of calcination (minute)555555Frequency of firing111111

TABLE 2ComparativeExampleExampleNumber121314151617181920123Crystal...

examples 12 , 19 , 20

Examples 12, 19, 20

[0092]In Example 12, composition for crystal diameter controlling layer which had been prepared as described-above to have a concentration of 1% by mass was coated on the Pt base electrode of the substrate by spin coating method, where the spin coating was performed firstly with a rotation rate of 500 rpm for 3 seconds, and subsequently with a rotation rate of 2000 rpm for 20 seconds. Next, the coated composition was dried and preliminarily fired by heating the substrate using a hot-plate at 175° C. for 5 minutes in the air atmosphere, thereby obtaining a crystal diameter controlling layer of 2 nm in thickness. Next, an orientation controlling layer of 60 nm in thickness was formed on the crystal diameter controlling layer using conditions shown in Table 2, to constitute a ferroelectric thin film.

[0093]In each of Examples 19 and 20, ferroelectric thin film was obtained by forming a orientation controlling layer on a crystal diameter controlling layer after forming...

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Abstract

A method for producing a ferroelectric thin film comprising: coating a composition for forming a ferroelectric thin film on a base electrode of a substrate having a substrate body and the base electrode that has crystal faces oriented in the (111) direction, calcining the coated composition, and subsequently performing firing the coated composition to crystallize the coated composition, and thereby forming a ferroelectric thin film on the base electrode, wherein the method includes formation of a orientation controlling layer b coating the composition on the base electrode, calcining the coated composition, and firing the coated composition, where an amount of the composition coated on the base electrode is controlled such that a thickness of the orientation controlling layer after crystallization is in a range of 35 nm to 150 nm, and thereby controlling the preferential crystal orientation of the orientation controlling layer in the (100) plane.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a method for producing a ferroelectric thin film that is controlled to have preferential crystal orientation in the (100) plane with a simple process.[0003]Priority is claimed on Japanese Patent Application No. 2011-110680 filed on May 17, 2011 and Japanese Patent Application No. 2012-073402 filed on Mar. 28, 2012, the content of which is incorporated herein by reference.[0004]2. Description of Related Art[0005]In recent years, ferroelectric thin films utilized as capacitors and piezoelectric elements are widely developed so as to satisfy requirements for downsizing electronic elements.[0006]Lead zirconate titanate (PZT) is a ferroelectric material that has a perovskite structure and exhibits excellent ferroelectric properties. Using a chemical solution deposition (CSD) method utilizing sol-gel solution, it is possible to achieve homogeneous film composition in the plane of a substrate w...

Claims

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Application Information

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Patent Type & AuthorityApplications(United States)
IPC IPC(8): H01L21/02H01L21/28H01L49/02H01L41/319B05D3/02B05D5/00
CPCH01L21/02197B05D3/0254H01L21/28291H01L28/55H01L41/319B05D5/00H01L21/022H01L21/02282H01L28/65H01L28/75Y10T428/265Y10T428/249921Y10T428/25Y10T428/26H01L29/40111H10N30/079H10N30/708
InventorWATANABE, TOSHIAKISAKURAI, HIDEAKISOYAMA, NOBUYUKIDOI, TOSHIHIRO
OwnerMITSUBISHI MATERIALS CORP