The invention belongs to the optical field and the field of micro-nano systems, and particularly relates to a preparation method of an optical waveguide type minicircle resonant cavity humidity sensorcoated with a TiO2 thin film. The optical waveguide type minicircle resonant cavity humidity sensor includes photoetching on an annular resonant cavity, straight waveguide and input and output grating and coating on the TiO2 thin film on a waveguiding structure. By means of the unique ambulatory mode effect of a minicircle resonant cavity prepared on the SOI waveguide, an optical wave performs resonance in a minicircle, the stable resonance phenomenon can be observed by means of a spectrometer, when the relative humidity of the external world changes, a humidity sensitive thin film absorbs water, the resonant cavity refractive index changes, and then an output spectral line observed on the spectrometer performs wave length shift, and measurement of the humidity is completed. Compared withan ordinary humidity sensor, the optical waveguide type minicircle resonant cavity humidity sensor has the advantages of being easy to operate, low in cost, small in volume, short in reaction time, high in flexibility and not prone to electromagnet interference, and therefore the sensor has the extremely high application value.