The present application relates to the technical field of tactile sensing, in particular to a six-dimensional force
tactile sensor based on mode interference
fiber structure and a preparation method thereof. The six-dimensional force
tactile sensor comprises a rigid substrate, a flexible
elastomer arranged on the substrate, and a sensing group arranged in the flexible
elastomer. The sensing group is composed of at least three mode interference fibers uniformly arranged around the center of the sensing area. One end of the
fiber extends from the bottom to the top of the flexible
elastomer. By measuring the change of the
light wave interference of each
fiber, combining the temperature compensation of the reference fiber and the sensitivity matrix obtained by calibration, the six-dimensional force and torque vector is calculated by using the regularization least square method. The embodiment can solve the shortcomings of the six-dimensional
force sensor in terms of
electromagnetic interference resistance, flexible integration and
miniaturization, and improve the multi-dimensional force
demodulation accuracy and stability.