Evaporation source and vapor deposition apparatus provided with it

A technology of evaporation source and supporting device, which is applied in the direction of vacuum evaporation coating, lighting device, electroluminescent light source, etc., can solve the problems of increased production cost, achieve the effects of preventing internal pollution, preventing side diffusion, and improving heat dissipation effect

Active Publication Date: 2009-06-03
SAMSUNG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0015] In this way, the structural parts of the vapor deposition device are either damaged or damaged, and the parts must be replaced continuously, which increases the production cost.

Method used

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  • Evaporation source and vapor deposition apparatus provided with it
  • Evaporation source and vapor deposition apparatus provided with it
  • Evaporation source and vapor deposition apparatus provided with it

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Embodiment Construction

[0073] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following embodiments are presented as examples in order to fully convey the idea of ​​the present invention to those skilled in the art. Therefore, the present invention is not limited to the following embodiments, and various modifications are possible. The lengths and thicknesses of layers and regions in the drawings may be exaggerated for clarity. The same reference signs in this specification denote the same structural elements.

[0074] figure 1 It is a perspective view showing the evaporation source of the first embodiment of the present invention.

[0075] Referring to the drawings, the evaporation source 100 constitutes an evaporation substance storage part, which is placed with evaporation substances and partially opened. Furthermore, a nozzle portion 30 having an opening A for spraying the vapor deposition substance is provided...

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Abstract

The invention provides an evaporation source and a vapor deposition apparatus provided with it, which effectively raises a temperature of a nozzle by using a reflector plate, and thereby prevents an evaporated material from being condensed at the nozzle. The evaporation source comprises: a vaporizing-material storage section for storing a vaporizing material and having one part opened; a nozzle which has an opening for spraying the vaporizing material and is connected to the opened part of the vaporizing-material storage section; the reflector plate surrounding at least some corners of the nozzle; a housing surrounding the vaporizing-material storage section; and a heating section arranged between the housing and the vaporizing-material storage section. The vapor deposition apparatus has the evaporation source. Besides, because the organic evaporation source of the invention improves material of the organic storage section and the nozzle and is added with organic anti-leakage section on surface, the thermal conductivity of the organic storage section and the nozzle is increased and preventing the organic from being leakaged.

Description

[0001] This application is a divisional application of the No. 200510126935.5 invention patent application filed on November 28, 2005. technical field [0002] The present invention relates to an evaporation source and an evaporation device equipped with the evaporation source, and more specifically relates to an evaporation source for evaporating organic substances or conductive substances on a large-area substrate and an evaporation device equipped with the evaporation source. Background technique [0003] An organic semiconductor device including an organic electroluminescent display device requires a step of forming an organic film. Since the substance to form the organic film is different whether it is a low molecular weight or a high molecular weight, the method of forming the film is also different. [0004] In the case of the polymer substance, the organic substance is dissolved in a solvent, and an organic film is formed using the dissolved organic substance. The o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/12C23C14/243H05B33/10H10K71/164H10K71/00
Inventor 安宰弘李星昊郑锡宪赵源锡康熙哲
Owner SAMSUNG DISPLAY CO LTD
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