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Tool for realizing both revolution and autorotation and only autorotation on multi-arc ion plating equipment

A multi-arc ion plating, public rotation technology, applied in ion implantation plating, sputtering plating, vacuum evaporation plating, etc., can solve the problem that the pinion shaft rotation mode cannot be formed, and achieve simple structure and high deposition efficiency The effect of reducing and increasing the utilization rate

Active Publication Date: 2010-09-08
BEIJING AVIATION MATERIAL INST NO 1 GRP CORP CHINA AVIATION IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The original tooling structure can only be used after being installed in this way, and it cannot form a mode in which only the pinion shaft rotates

Method used

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  • Tool for realizing both revolution and autorotation and only autorotation on multi-arc ion plating equipment
  • Tool for realizing both revolution and autorotation and only autorotation on multi-arc ion plating equipment
  • Tool for realizing both revolution and autorotation and only autorotation on multi-arc ion plating equipment

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Experimental program
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Embodiment Construction

[0013] The tooling structure includes a large gear, a large plate, a small gear, a small bearing, and a small bearing sleeve. The pinion structure of frock is to be made up of dual-purpose station shaft 7, small bearing 10, bearing cap 12, clip ring 8, key 6, pinion 9, bearing cap 12, small bearing sleeve 11, bolt 24. There are station holes for installing the dual-purpose station shaft 7 evenly on the disk surface of the large plate 3, and the upper and lower ends of the dual-purpose station shaft 7 are provided with jacking screw holes 5, and the jacking screw holes 5 are used to fix the double-purpose station shaft 7. The sample rack, the dual-purpose station shaft 7 is placed in the station hole, the pinion 9 and the dual-purpose station shaft 7 are connected by a small bearing 10, the pinion 9 is fixed to the dual-purpose station shaft 7 by a key 6, and the clamp ring 8 holds the small The gear 9 is fixed on the dual-purpose station shaft 7, so that the pinion 9 no longer...

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Abstract

The invention relates to a tool for realizing both revolution and autorotation and only autorotation on multi-arc ion plating equipment. Through the match of the upper and lower surfaces of the tool structure with a main shaft, the invention realizes two rotation modes for the tool, namely both revolution and autorotation and only autorotation. When a gear wheel of the tool structure is fixed withthe main shaft, the main shaft drives the gear wheel to rotate, the gear wheel then drives a pinion to rotate and the pinion subsequently drives a corresponding dual-purpose station shaft to rotate,thus realizing the autorotation mode of the tool. When a big plate of the tool structure is fixed with the main shaft, the gear wheel is fixed by a positioning pin, the shaft drives the big plate to rotate, the big plate drives the pinion to rotate, the pinion subsequently drives a corresponding dual-purpose station shaft to rotate, thus realizing the mode of both revolution and autorotation of the tool. The tool can meet the requirement for conducting deposition of large quantities of workpieces and single-target novel coatings. The method is simple and easy for practice and convenient for mounting, and technical personnel of the professional group have completely mastered the preparation of the tool and can favorably meet the requirement of the ion plating equipment on the rotation modesof both revolution and autorotation and only autorotation of the tool.

Description

technical field [0001] The invention relates to a multi-arc ion plating equipment capable of realizing revolution and self-rotation tooling. Background technique [0002] Multi-arc ion plating equipment is used to prepare TiN, ZrN, TiC, CrN and other hard wear-resistant coatings, NiCrAlY series coatings and Al, Ti and other metal coatings, etc., to improve the wear resistance, erosion resistance, Oxidation resistance, corrosion resistance and other properties. Multi-arc ion plating equipment generally has at least 4 target sources, and its tooling adopts the method of revolution and rotation, that is, during the coating deposition process, the workpiece rotates while revolving, so as to ensure the coating composition of each tooling workpiece during the deposition process. , The consistency of thickness. [0003] However, in the research of new coatings and the deposition of a single workpiece, if the method of revolution and rotation is used, multiple targets are opened a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/54C23C14/56C23C14/24
Inventor 吴小梅郭万生商晓宇王晋平
Owner BEIJING AVIATION MATERIAL INST NO 1 GRP CORP CHINA AVIATION IND
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