Information processing device, information processing method, and program

Abstract

To solve a problem that the parameter adjustment of semiconductor manufacturing has not been able to be efficiently and speedily performed. An information processing device comprises a target value receiving section (101) for receiving one or more kinds of target values of a semiconductor manufacturing process, a parameter acquiring section (102) for acquiring one or more parameter values at the time of executing the semiconductor manufacturing process, an execution result acquiring section (103) for acquiring one or more kinds of execution results indicating the execution results of the semiconductor manufacturing process, an accumulation section (105) for accumulating the execution results, the target values, and the parameter values in association with one another, a correlation acquiring section (107) for acquiring information on the correlation of the accumulated execution results, target values, and parameter values, an assist information acquiring section (108) for acquiring assist information which is information on a parameter having a high correlation with the target values received by the target value receiving section (101) by using the correlation information acquired by the correlation acquiring section (107), and an output section for outputting the assist information acquired by the assist information acquiring section.

Description

technical field [0001] The present invention relates to an information processing device or the like used in a semiconductor manufacturing process or the like using a manufacturing device. Background technique [0002] Among the conventional manufacturing methods of semiconductor devices, there is known a method comprising a step of manufacturing the semiconductor device carried out before the manufacturing process of the semiconductor device in one manufacturing process of the semiconductor device. Recording a processing history and inspection results of the process into a computer-readable storage medium; and deciding a processing condition of the one manufacturing process based on the processing history and inspection results recorded in the storage medium; and using at least one computer to perform these steps (for example, refer to Patent Document 1). [0003] However, in the actual semiconductor manufacturing process, even if it is the same manufacturing device, the d...

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Problems solved by technology

[0009] However, conventionally, there has been a problem that since the range of changes in parameters, etc. In the absence of a skilled person, it is impossible to set the parameters of the manufacturing equipment to obtain the target result, and in order to obtain the target result, it is necessary to repeat experiments, etc., which takes time

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