Packaging structure and method for optical microcavity coupling system

Abstract

The invention relates to a packaging structure and a packaging method for an optical microcavity coupling system. The structure of the invention comprises an optics microcavity, a coupler, and characteristically comprises a packaging body; wherein the packaging body is formed by the solidification of the low loss optical transparent packaging material including the whole the optical microcavity and the coupler. The low loss optical transparent packaging material of which the refractive index is lower than that of the optical microcavity coupling system is utilized to package a coupled structure formed by the whole optical microcavity and a coupler. The packaging structure and the packaging method make the optical microcavity coupling system more stable and greatly promote the development process of optical microcavity devices.

Description

technical field [0001] The invention belongs to the technical field of micro-opto-mechanical systems, and mainly relates to a device packaging method, in particular to a packaging structure of an optical microcavity coupling system and a packaging method thereof. Background technique [0002] Whispering gallery mode (WGM) high-Q optical microcavities have been extensively studied in recent years. In this mode, the laser light propagates along the great circle of the optical microcavity with total reflection. Therefore, only a very small part of the light energy in the microcavity leaks out of the cavity, thus forming a high-Q optical mode propagating along the interface. The ultra-high Q value makes this type of optical microcavity applicable to low-threshold laser emission, high-sensitivity sensors, optical communication devices and other fields. [0003] However, the high-efficiency excitation of the optical mode of the microcavity whispering gallery requires an external...

AI Technical Summary

Problems solved by technology

In this coupling system, the distance between the coupler and the optical microcavity needs to be controlled within a certain range to achieve high-efficiency coupling. When this structure is used for the application research of sensing and detection, the detection will often be caused by the change of the coupling state. inconvenience, poor stability

For example, in the sensing research of optical microcavity motion parameters, (such as: optical microcavity accelerometer, optical microcavity gyroscope, etc.) often cause the drift of the coupling state due to the vibration of the coupling system, thus causing system errors

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