Encapsulating structure and encapsulating method of high-Q-value optical micro-cavity coupling system based on LTCC (Low Temperature Co-Fired Ceramic)

Abstract

The invention relates to an encapsulating structure and an encapsulating method of a high-Q-value optical micro-cavity coupling system based on LTCC (Low Temperature Co-Fired Ceramic). The encapsulating structure comprises an optical micro cavity, a coupler and a two-layer encapsulating body, wherein the first layer of the encapsulating body is formed by condensing an optical transparent encapsulating material accommodating the whole optical micro cavity and the coupler, so that the shock resistance of the system is enhanced; the second layer of the encapsulating body is partitioned into upper, middle and lower parts made of a ceramic material; the first layer of the encapsulating body is fully embedded into a middle layer through technical operation; the upper and lower layers are tightly bonded with the middle layer through a bonding agent at a high temperature, so that the defect that the first layer of the encapsulating material tends to be influenced by the environmental temperature is overcome, and the temperature stability is enhanced. The optical transparent encapsulating material of which the refractive index is lower than the refractive index of the optical micro-cavity coupling system is used for accommodating a coupling structure constructed by the whole optical micro cavity and the coupler, and a layer of ceramic material with a special structure is added outside, so that errors caused by the environmental temperature change are controlled. By adopting the encapsulating structure and the encapsulating method, the optical micro-cavity coupling system becomes more stable.

Description

technical field [0001] The invention belongs to the technical field of micro-opto-electromechanical systems, and mainly relates to a device packaging method, in particular to a packaging structure and a packaging method of an LTCC-based high-Q optical microcavity coupling system. Background technique [0002] The gyroscope is a sensor device for measuring the rotational angular velocity and attitude angle of the carrier. It is one of the core key components of inertial navigation. It can be widely used in aerospace, aviation, navigation, military, automobile manufacturing, and consumer electronics. favored by researchers. The optical resonator gyro can greatly reduce the volume and weight of the device, and can also fully reduce the thermal effect of the device. More importantly, the whispering gallery mode (WGM) high-Q optical microcavity, due to its small mode volume, makes the laser along the The large circumference of the microcavity propagates in the way of total refle...

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Problems solved by technology

[0003] In order to solve the problem that the coupling system composed of the existing optical microcavity and coupler is unstable and easily affected by changes in the external environment, the present invention designs an optical microcavity coupling system with s

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