64results about How to "Avoid rough surfaces" patented technology

Disclosed is a solution for removing a residue after a dry processing, which can prevent the cracking or roughening of a Cu surface which cannot be overcome by a conventional liquid polymer stripper, which can prevent the oxidation of a Cu surface, and which contains a surface-protecting agent. Also disclosed is a method for producing a semiconductor device by using the solution. Specifically disclosed is a solution for removing a residue remaining on a semiconductor substrate after dry etching and / or ashing, which comprises: a Cu surface-protecting agent comprising at least one compound selected from the group consisting of (1) a compound which has, as a basic skeleton, a 5-membered heterocyclic aromatic compound having a structure represented by the formula: =N-NH- (provided that one having three contiguous N atoms is excluded) and which shows a pH value of 7 or less in the form of an aqueous solution (10 ppm, 23 DEG C); (2) a compound which has, as a basic skeleton, a 5-membered heterocyclic compound having a structure represented by the formula: -N=C(SH)-X- [wherein X represents NH, O or S] and which shows a pH value of 7 or less in the form of an aqueous solution (10 ppm, 23 DEG C) and (3) a compound which has, as a basic skeleton, a 6-membered heterocyclic aromatic compound having at least one nitrogen atom (N) and which shows a pH value of 7 or more in the form of an aqueous solution (10 ppm, 23 DEG C); a compound capable of forming a complex or chelate in coordination with Cu (copper); and water. The solution has a pH value ranging from 4 to 9.

An image forming apparatus which may form first and second visual images on first and second sides of a recording medium, includes a first image bearing member, a second image bearing member, a first transfer device that transfers the first visual image formed on the first image bearing member onto the second image bearing member or the second visual image formed on the first image bearing member onto the second side of the recording medium, a second transfer device that transfers the first visual image carried by the second image bearing member onto the first side of the recording medium, and a fixing device including first and second fixing members so as to fix the second and first visual images on the second and first sides of the recording medium, respectively. Surface properties of the first fixing member and the second image bearing member are substantially the same.