Method and device for recycling heat energy in reduction exhaust in polysilicon production process

A heat energy recovery and polysilicon technology, applied in the direction of silicon, waste heat treatment, energy efficiency improvement, etc., can solve the problem of not effectively recycling the heat energy of the reduced exhaust gas, and achieve the effect of reducing the consumption.
CN102070145BActive Publication Date: 2011-10-05XINTE ENERGY
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
XINTE ENERGY
Publication Date
2011-10-05

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Abstract

The invention discloses a method and device for recycling heat energy in reduction exhaust in a polysilicon production process. The method comprises the following steps: reduction exhaust and chlorsilane are subjected to primary heat exchange in a tower bottom reboiler; and after heat exchange, part of the chlorsilane is vaporized and delivered into a chlorsilane purification tower to serve as a heat source for the chlorsilane purification tower, the reduction exhaust subjected to heat exchange is delivered into a condenser, and the chlorsilane in the reduction exhaust is condensed into liquid to be delivered into the chlorsilane purification tower. The device for recycling the heat energy in reduction exhaust in the polysilicon production process comprises a tower top condenser, a purification tower, a tower bottom reboiler, an exhaust condenser, a chlorsilane buffer tank and a chlorsilane delivery pump which are sequentially connected, wherein the outlet of the chlorsilane delivery pump is connected with the purification tower. By means of the technical improvement provided by the invention, the steam consumption of the reduction rectification system can be reduced by 40%, the load of the refrigerator of a CDI (capacitor discharge ignition) system can be reduced by 7% simultaneously, and the circulating water consumption is reduced by about 52.44%, thereby achieving the purposes of favorable energy conservation and consumption reduction.
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Description

technical field

[0001] The invention relates to a method for recycling heat energy, in particular to a method and a device for recycling heat energy of reduction tail gas in polysilicon production. Background technique

[0002] Polycrystalline silicon is an important raw material for the preparation of solar cells, integrated circuits and electronic devices. It is one of the basic raw materials with the largest consumption and the highest purity requirements in the information industry. It is also a product and industry that the country encourages the development of.

[0003] From the second half of 2006, driven by the high profits of the solar energy industry, a wave of polysilicon projects was launched in China. However, due to immature self-owned technology and backward imported technology, many projects generally suffer from serious environmental pollution, large material consumption, high production cost, low heat utilization rate and other problems, which have brought ...

Claims

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