Pressure-sharing cavity air thrust bearing

Abstract

The invention relates to an air bearing, in particular to a pressure-sharing cavity air thrust bearing which comprises at least one air floatation sliding block; a supporting surface of each air floatation sliding block is provided with at least one pyramid pressure-sharing cavity; the supporting surface is opposite to a substrate; the conical bottom surface of the pyramid pressure-sharing cavityis flush with the supporting surface; the peak of the pyramid pressure-sharing cavity is provided with an orifice; the orifice is communicated with an air supply pipeline which is arranged in the airfloatation sliding block; and the air supply pipeline is communicated with an external pressurizing air source. According to the invention, a diverging pyramid pressure-sharing cavity is adopted so that the high-pressure air more easily flows out along a parallel streamline when the high-pressure air flows in a bearing clearance through the orifice, the bearing vibration phenomenon educed by vortex close to the orifice is restrained, and the harm of micro vibration on the static and dynamic performance of the whole moving system is reduced.

Description

technical field [0001] The invention relates to an air-floating bearing, in particular to an air-floating thrust bearing with a pressure equalizing chamber. Background technique [0002] The air-bearing thrust bearing is the key component of the ultra-precision measurement and processing system, which has the advantages of cleanliness and no friction. With the development of air bearing thrust bearing applications such as nanotechnology, advanced optical devices and integrated circuits, higher requirements are placed on the static performance and positioning accuracy of air bearing thrust bearings. Pressure equalization cavity (groove) air-floating thrust bearing has become a hot research topic in recent years due to its characteristics of large load capacity, high rigidity, and low air consumption. The static and dynamic performance of its kinematic system, therefore, restricts the precision of the air bearing thrust bearing. [0003] In the traditional pressure equalizat...

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Problems solved by technology

However, the processing technology of porous materials is complex, and the manufacture of porous throttle air bearings is difficult, so domestic applications are relatively rare

[0007] The sections of the pressure equalizing chamber (groove) mentioned in the above three patents are all rectangular, which cannot solve the problem of micro-vibration of the bearing caused by the eddy current in the pressure equalizing chamber (groove), which limits the accuracy of the air bearing

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