Physical parameter common-channel phase-shift digital holographic microscopic device based on diffraction grating
A digital holographic microscope and diffraction grating technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of poor stability, poor measurement accuracy, environmental vibration sensitivity, etc., to achieve good stability, environmental vibration insensitivity, Effects with low monochromatic requirements
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[0057] Embodiment: a microlens array is used as the tested sample; the laser 1 is a He-Ne laser (λ=633nm); the magnification of the first telescope unit is 15X. The magnification of the microscope objective lens 7 is 10X, and the numerical aperture NA=0.3. Third lens 8 focal length f 2 =200mm; the focal lengths of the fourth lens 10 and the fifth lens 14 are respectively f 3 = f 4 =80mm, the focal length of the sixth lens 16 is f 5 =100mm, the focal length of the seventh lens 18 is f 6 = 300mm. The hole diameter of the second pinhole filter is 20 μm; the period Λ of the first grating 9 and the second grating 15 1 =Λ 2 = 15 μm. The maximum spectrum v of the object light on the plane where the first grating 9 is located max =NA / (M 2 λ)3.2×10 4 m -1 ,M 2 is the magnification of the second telescope unit. Because 1 / Λ 1 >2v max , so the device can separate the spectrum of different diffracted light under the premise of retaining the maximum resolution of the objectiv...
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