LA-ICPMS (laser ablation inductively coupled plasma mass spectrometry) based original position statistic distribution analysis system

Abstract

The invention discloses an LA-ICPMS (laser ablation inductively coupled plasma mass spectrometry) based original position statistic distribution analysis system and belongs to the technical field of material analysis characterization. The system disclosed by the invention comprises a laser ablation sample-injection system, an ICP (inductively coupled plasma) ion source system, an interface system, an ion transmission system, a mass spectrum detection system, a sample moving/positioning system and a signal processing system, wherein the sample moving/positioning system is used for continuously activating synchronous scanning, and the signal processing system is used for carrying out mathematical resolution on acquired mass spectrum signals. By using the system disclosed by the invention, based on the continuously-activated synchronous scanning moving/positioning of samples and the laser ablation inductively coupled plasma mass spectrometry (LA-ICPMS), an original position statistic distribution analysis on chemical compositions and states thereof in large-scale ranges of uneven surfaces of metallic and non-metallic materials can be realized. The system disclosed by the invention has the advantages that the system can be used for metal samples and appropriate for non-metallic samples as well; the content and distribution of an element (as low as 0.1 mu g/g) can be analyzed; compared with an original position analyzer for metals, the sensitivity is increased by three orders of magnitude; and the system is suitable for samples with regular and even surfaces and samples with irregular or special-shaped surfaces.

Description

technical field [0001] The invention belongs to the technical field of material analysis and characterization, and in particular provides a laser ablation inductively coupled plasma mass spectrometry in-situ statistical distribution analysis system, which mainly relates to chemical components and their state origins in a large-scale range on the surface of metal or non-metal materials. Instrumentation for bit statistical distribution analysis. Background technique [0002] In the large-scale range of materials (cm 2 ) Chemical composition, segregation, surface defects, and content of inclusions are the four most important items in the quality control of steel and other materials. In the prior art, scanning electron microscopes, electron probes, etc. can only characterize materials within the micro-region (mm 2 ) chemical composition and organizational structure; for the analysis and characterization of large-scale materials, the sulfur printing test is traditionally used t...

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Problems solved by technology

[0003] Metal in situ analyzer (Original Position Analyzer, OPA) successfully resolved the large-scale range (cm 2 ), in-situ statistical distribution analysis and characterization of chemical composition and its state, but this technology has the following limitations: 1. The spark source is used as the excitation source, which is only suitable for conductive metal samples and cannot analyze non-metallic samples; 2. Based on atomic emission spectroscopy, the matrix effect is serious and the sensitivity is low, which cannot meet the analysis of trace and ultra-trace elements; 3. It is suitable for samples with regular and flat surfaces, not suitable for non-planar surfaces of materials

[0004] Among existing instruments, Inductively Coupled Plasma Mass Spectrometry (ICP-MS) can simultaneously analyze multiple chemical components in materials with high sensitivity. However, due to the following reasons, it cannot be used for large-scale chemical components and Analysis and characterization of its state: 1. The commonly used solution sampling method can only obtain the average content information of the element in the sampling part of the analysis sample, but cannot obtain the information on the distribution of the sample components; 2. The laser ablation solid sampling method of the current commercial instruments Both are static excitation, keep the sample fixed during the analysis process, only a spot with a diameter of 10-100 μm is excited and ablated each time for sampling, and the position of a single ablation cannot be recorded, so that the corresponding information of the composition and position cannot be obtained

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