Manufacture method of distributed feedback laser for restraining space hole-burning effect

Abstract

The invention provides a manufacture method of a distributed feedback laser for restraining a space hole-burning effect, which comprises the steps of: 1. selecting a substrate; 2. sequentially growing two medium masks on the substrate, resist coating, photoetching, and forming a medium mask pattern between the two medium masks, wherein a growth window is formed between the two medium masks; 3. manufacturing a multiple quantum well active area at an epitaxy on the substrate 1 which is provided with the medium mask pattern; 4. manufacturing an even raster on the surface layer of the multiple quantum well active area; 5. removing the medium masks in a corroding way, and growing a growth package layer and an electric contact layer on the even raster; 6. resist coating and photoetching on the electric contact layer; 7. manufacturing a ridgelet guide structure on the electric contact layer by means of wet etching; 8. manufacturing a front-side electrode at the top end of the ridgelet guide structure; and 9. manufacturing a back-side electrode at the bottom of the substrate after the thickness of the substrate is reduced so as to manufacture the distributed feedback laser.

Description

technical field [0001] The invention relates to the field of optoelectronic devices, in particular to a method for manufacturing a distributed feedback laser that suppresses the spatial hole-burning effect. Background technique [0002] High power, single longitudinal mode, narrow linewidth distributed feedback (DFB) laser is the core device of modern optical fiber communication technology. In order to improve its single-mode yield, a λ / 4 phase shift is introduced in the center of the cavity, but due to the introduction of the phase shift structure, the optical field distribution of the λ / 4 phase shift structure laser is discontinuous in the center of the cavity, and appears in the center The sharp peak, the high concentration of the optical field in the center leads to a large consumption of carriers here, resulting in a spatial hole burning effect. This changes the intensity and phase of the optical feedback in the resonator, causing the fluctuation of the gain spectrum, ...

AI Technical Summary

Problems solved by technology

Although these methods of modulating the period or shape of the grating are effective, since the grating in the modulation area is very different from other parts, the requirements for the grating manufacturing process are quite strict, and the actual manufacturing is difficult and the manufacturing process is complicated and the efficiency is low. ,expensive

Images