Gain scheduling control method for magnetic suspension molecular pump

A technology of gain scheduling control and molecular pumps, which is applied in pump control, pumps, axial flow pumps, etc., can solve problems such as the difficulty of rotor vibration suppression, and achieve the effect of improving stability

Active Publication Date: 2012-04-25
KYKY TECH +1
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Problems solved by technology

[0006] Therefore, what the present invention aims to solve is the technical problem that the rotor vibration is difficult to suppress during the rotor speed-up process due to the existence of the r

Method used

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  • Gain scheduling control method for magnetic suspension molecular pump
  • Gain scheduling control method for magnetic suspension molecular pump
  • Gain scheduling control method for magnetic suspension molecular pump

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specific Embodiment approach

[0027] The following provides a specific implementation of a magnetic levitation molecular pump gain scheduling control method according to the present invention, including the following steps:

[0028] (1) The magnetic levitation molecular pump controller 17 controls the speed up of the magnetic levitation molecular pump motor, detects the rotor displacement through the rotor displacement detection device 16 , and detects the rotor speed through the rotor speed detection device 15 .

[0029] Generally, when the rotor speed is less than 40 rpm, it is low speed; when the rotor speed is between 40 rpm and 80 rpm, it is medium and low speed; when the rotor speed is between 80 rpm and 140 rpm, it is Medium speed; when the rotor speed is between 140 rpm and 220 rpm, it is medium and high speed; when the rotor speed is greater than 220 rpm, it is high speed, and the rotor speed is at high speed.

[0030] The rotor displacement detection device 16 and the rotor speed detection device...

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Abstract

The invention discloses a gain scheduling control method for a magnetic suspension molecular pump. The method comprises the following steps of: calling a high-rigidity and high-damping control parameter to control the magnetic suspension molecular pump by using a dispersion PID (Proportion Integration Differentiation) controller when a rotor rotates at a low rotating speed, and gradually starting a displacement cross feedback controller when the speed of the rotor rises to a medium-low speed to effectively suppress rotor precession in the rotating process of the rotor and vibration caused by the structural mode of a system; when the rotating speed of the rotor reaches a medium speed, gradually switching the parameter of the dispersion PID controller to a low-rigidity and low-damping control parameter; and when the rotating speed of the rotor reaches a medium-high speed, gradually starting a speed cross feedback controller to suppress rotor nutation in the rotating process of the rotor and ensure that the rotor can stably reach a rated working rotating speed. Due to the adoption of the method, the technical problem of vibration caused by the rotor gyroscopic action in the working process of the molecular pump and the structural mode of the system is solved, the rotor vibration can be effectively suppressed in the working process of the molecular pump, and stable running of the magnetic suspension molecular pump can be ensured.

Description

technical field [0001] The invention relates to a control method of a magnetic levitation molecular pump, in particular to a gain scheduling control method of the magnetic levitation molecular pump. Background technique [0002] The molecular pump is a kind of vacuum pump that uses the high-speed rotating rotor to transmit the momentum to the gas molecules to obtain a directional speed, which is compressed and driven to the exhaust port and then sucked away by the front stage. The magnetic suspension molecular pump is a new type of high-performance molecular pump that uses magnetic bearings to generate electromagnetic force to suspend the rotor in the air, so that there is no mechanical contact between the rotor and the stator, and the rotor position can be actively controlled. The magnetic levitation molecular pump has the advantages of no friction, no lubrication, no pollution, high speed and long life, so the magnetic levitation molecular pump is widely used in the field ...

Claims

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Application Information

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IPC IPC(8): F04D27/00F04D19/04
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH
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